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Chinese Journal of Lasers, Volume. 38, Issue 2, 208005(2011)

A Fast Detection and Compensation of Microscope Defocus Method Based on Laser Triangulation Method on TFT-LCD Inspection

Fan Fuming* and Cheng Lianglun
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    Article index updated: Mar. 10, 2025

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    Fan Fuming, Cheng Lianglun. A Fast Detection and Compensation of Microscope Defocus Method Based on Laser Triangulation Method on TFT-LCD Inspection[J]. Chinese Journal of Lasers, 2011, 38(2): 208005

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    Paper Information

    Category: Measurement and metrology

    Received: May. 14, 2010

    Accepted: --

    Published Online: Jan. 30, 2011

    The Author Email: Fuming Fan (fanfumin84@126.com)

    DOI:10.3788/cjl201138.0208005

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology