The fast automatic focusing equipment of optical imaging detection is one of the most important devices in rapid optical inspection based on machine vision. In order to limit the impact caused by multiple objectives, whose depths of fields(DOF) are from 0.5 μm to 91 μm, and vibration in rapid automatic focusing, a fast detection and compensation of microscope defocus method based on laser triangulation method is proposed. In this method, a macro institution into micro dual driven structure is proposed. It is constructed by the piezoelectric ceramics(PZT) with stroke of 100 μm and direct current(DC) motor with stroke of 25 mm. Based on the structure and laser triangulation, multiple objectives, defocus amount and direction are rapidly detected, cooperating with PZT and DC motor. Experimental results show that the macro-micro dual-drive focus mode can achieve a wide range of auto focusing within 0.4 s, from a low magnification objective (±91 μm) DOF to a higher magnification objective (±0.5 μm), and follow focus in the vibration range (±3 μm). This method meets requirements of the industrial thin film transistor-liquid crystal display(TFT-LCD) automation inspection equipment in broad automatic focusing range, speed and accuracy. It can also be applied in many other fields, such as flat panel display(FPD) inspection, printed circuit board inspection, biomedicine, automatic assembly machines and so on.