Design of Uniform Illumination Optical Source with 365 nm LED and Application in Lithography

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Wang Xiangxian, Wang Bo, Fu Qiang, Chen Yikai, Hu Jigang, Zhang Douguo, Ming Hai. Design of Uniform Illumination Optical Source with 365 nm LED and Application in Lithography[J]. Chinese Journal of Lasers, 2012, 39(4): 416001

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Received: Oct. 12, 2011

Accepted: --

Published Online: Mar. 17, 2012

The Author Email: Wang Xiangxian (wangxx869@126.com)

DOI:10.3788/cjl201239.0416001

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology