Chinese Journal of Lasers, Volume. 39, Issue 4, 416001(2012)
Design of Uniform Illumination Optical Source with 365 nm LED and Application in Lithography
Cited By
Article index updated: Sep. 7, 2025
The article is cited by 20 article(s) CLP online library. (Some content might be in Chinese.)
Tools
Get Citation
Copy Citation Text
Wang Xiangxian, Wang Bo, Fu Qiang, Chen Yikai, Hu Jigang, Zhang Douguo, Ming Hai. Design of Uniform Illumination Optical Source with 365 nm LED and Application in Lithography[J]. Chinese Journal of Lasers, 2012, 39(4): 416001
Paper Information
Category:
Received: Oct. 12, 2011
Accepted: --
Published Online: Mar. 17, 2012
The Author Email: Wang Xiangxian (wangxx869@126.com)
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20