Chinese Journal of Lasers, Volume. 39, Issue 4, 416001(2012)
Design of Uniform Illumination Optical Source with 365 nm LED and Application in Lithography
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Wang Xiangxian, Wang Bo, Fu Qiang, Chen Yikai, Hu Jigang, Zhang Douguo, Ming Hai. Design of Uniform Illumination Optical Source with 365 nm LED and Application in Lithography[J]. Chinese Journal of Lasers, 2012, 39(4): 416001
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Received: Oct. 12, 2011
Accepted: --
Published Online: Mar. 17, 2012
The Author Email: Wang Xiangxian (wangxx869@126.com)
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