Research on High Energy Efficiency Pupil Correction Based on Multi-ring Partition in Photolithography Machine

Siyu Zhu; Baoxi Yang; Xiaozhe Ma; Fang Zhang; Weilin Cheng; Zhiyuan Niu; Huijie Huang

doi:10.3788/CJL202148.1704001

Chinese Journal of Lasers, Volume. 48, Issue 17, 1704001(2021)

Research on High Energy Efficiency Pupil Correction Based on Multi-ring Partition in Photolithography Machine

Siyu Zhu^1,2, Baoxi Yang^1,2, Xiaozhe Ma^1,2, Fang Zhang^1、**, Weilin Cheng¹, Zhiyuan Niu¹, and Huijie Huang^1,2、*

¹Laboratory of Information Optics and Optoelectronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

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Figures & Tables(15)

Fig. 1. Schematic diagram of illumination system for photolithography machine

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Fig. 2. Schematic diagrams of region partitions of pupil characteristic parameters. (a) b_HV and $b_{Q_{45}}$ ; (b) b_X; (c) b_Y; (d) b_ST and $b_{Q_{0}}$

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Fig. 3. Schematic diagram of tangential 8 partitions of pupil

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Fig. 4. Schematic diagram of selected process for optimal reference value of energy

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Fig. 5. Schematic diagram of radial multi-ring partition of pupil

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Fig. 6. Flow chart of high energy efficiency pupil correction method based on radial multi-ring partition

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Fig. 7. Distributions of fields of view in illumination light field

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Fig. 8. Pupil diagrams of illumination modes with different coherent factors in central field of view. (a) A₁; (b) A₂; (c) A₃; (d) Q₁; (e) Q₂; (f) Q₃

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Fig. 9. Comparisons of pupil characteristic parameters before and after correction of illumination mode A₃ . (a) Ellipticity; (b) pole balance in X direction; (c) pole balance in Y direction; (d) pole balance in four quadrants

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Fig. 10. Comparisons of pupil characteristic parameters before and after correction of illumination mode Q₃. (a) Ellipticity; (b) pole balance in X direction; (c) pole balance in Y direction; (d) pole balance in four quadrants

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Table 1. Coherent factors of 6 kinds of illumination modes and the maximum value of characteristic parameters of uncorrected pupils in each field of view

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Table 1. Coherent factors of 6 kinds of illumination modes and the maximum value of characteristic parameters of uncorrected pupils in each field of view

Illumination modes	Inner coherent factor	Outer coherent factor	Ellipticity	Pole balance in X direction	Pole balance in Y direction	Pole balance in four quadrants
A₁	0.20	0.44	3.26	0.30	1.75	2.04
A₂	0.47	0.72	5.12	0.07	1.82	2.13
A₃	0.54	0.83	5.63	0.08	1.80	1.89
Q₁	0.20	0.44	0.88	0.79	1.39	2.17
Q₂	0.36	0.60	0.91	1.25	2.36	3.60
Q₃	0.64	0.88	0.76	3.43	1.29	4.73
Target requirement			3.00	3.00	3.00	4.00

Table 2. Transmittances of two kinds of pupil correction plates at annular illumination modes

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Table 2. Transmittances of two kinds of pupil correction plates at annular illumination modes

Method	Illumination mode	Region 1	Region 2	Region 3	Region 4	Region 5	Region 6	Region 7	Region 8
Traditional method	A₁	0.9515	1.0000	0.9892	0.9550	0.9346	0.9407	0.9434	0.9249
	A₂	0.9219	0.9890	1.0000	0.9340	0.9045	0.9454	0.9406	0.9293
	A₃	0.9201	0.9881	1.0000	0.9298	0.9056	0.9531	0.9371	0.9329
Multi-ring method	M₁	0.9838	1.0000	1.0000	0.9698	0.9593	0.9609	0.9609	0.9603
	M₂	0.9709	1.0000	1.0000	0.9872	0.9518	1.0000	0.9978	0.9847
	M₃	0.9685	1.0000	1.0000	0.9763	0.9612	1.0000	0.9837	0.9793

Table 3. Correction results of two kinds of pupils at annular illumination modes

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Table 3. Correction results of two kinds of pupils at annular illumination modes

Method	Illumination mode	Ellipticity	Pole balance in X direction	Pole balance in Y direction	Pole balance in four quadrants	Energy loss
Method	Illumination mode	b_HV /%	b_X /%	b_Y /%	$b_{Q_{0}}$ /%	${E_{L}}_{j}$ /%
Traditional method	A₁	0.64					0.31	0.20	0.49	4.54
	A₂	0.42					0.08	0.22	0.49	5.54
	A₃	0.84					0.19	0.42	0.95	5.52
Multi-ring method	A₁	2.26					0.16	0.72	0.89	1.98
	A₂	2.15					0.06	1.30	1.42	2.06
	A₃	2.35					0.12	1.26	1.47	2.21

Table 4. Transmittances of two kinds of pupil correction plates at quadrupole illumination modes

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Table 4. Transmittances of two kinds of pupil correction plates at quadrupole illumination modes

Method	Illuminationmode	Region 1	Region 2	Region 3	Region 4	Region 5	Region 6	Region 7	Region 8
Traditional method	Q₁	1.0000	1.0000	1.0000	1.0000	1.0000	1.0000	1.0000	1.0000
	Q₂	1.0000	1.0000	1.0000	1.0000	1.0000	1.0000	1.0000	1.0000
	Q₃	0.9441	0.9441	0.9916	0.9916	1.0000	1.0000	0.9454	0.9454
Multi-ring method	M₁	1.0000	1.0000	1.0000	1.0000	1.0000	1.0000	1.0000	1.0000
	M₂	1.0000	1.0000	1.0000	1.0000	1.0000	1.0000	1.0000	1.0000
	M₃	0.9543	0.9543	1.0000	1.0000	1.0000	1.0000	0.9712	0.9712

Table 5. Correction results of two kinds of pupils at quadrupole illumination modes

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Table 5. Correction results of two kinds of pupils at quadrupole illumination modes

Method	Illumination modes	Ellipticity	Pole balance in X direction	Pole balance in Y direction	Pole balance in four quadrants	Energy loss
Method	Illumination modes	b_ST /%	b_X /%	b_Y /%	$b_{Q_{45}}$ /%	${E_{L}}_{j}$ /%
Traditional method	Q₁	0.88					0.79	1.39	2.17	0.00
	Q₂	0.91					1.25	2.36	3.60	0.00
	Q₃	0.48					0.80	1.05	1.86	3.06
Multi-ring method	Q₁	0.87					0.76	1.39	2.13	0.03
	Q₂	0.89					1.21	2.35	3.55	0.04
	Q₃	1.28					2.53	1.04	3.59	0.93

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Siyu Zhu, Baoxi Yang, Xiaozhe Ma, Fang Zhang, Weilin Cheng, Zhiyuan Niu, Huijie Huang. Research on High Energy Efficiency Pupil Correction Based on Multi-ring Partition in Photolithography Machine[J]. Chinese Journal of Lasers, 2021, 48(17): 1704001

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Paper Information

Category: Measurement and metrology

Received: Dec. 30, 2020

Accepted: Mar. 12, 2021

Published Online: Sep. 1, 2021

The Author Email: Zhang Fang (zhangfang@siom.ac.cn), Huang Huijie (huanghuijie@siom.ac.cn)

DOI:10.3788/CJL202148.1704001

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology