Research on High Energy Efficiency Pupil Correction Based on Multi-ring Partition in Photolithography Machine

Siyu Zhu; Baoxi Yang; Xiaozhe Ma; Fang Zhang; Weilin Cheng; Zhiyuan Niu; Huijie Huang

doi:10.3788/CJL202148.1704001

Chinese Journal of Lasers, Volume. 48, Issue 17, 1704001(2021)

Research on High Energy Efficiency Pupil Correction Based on Multi-ring Partition in Photolithography Machine

Siyu Zhu^1,2, Baoxi Yang^1,2, Xiaozhe Ma^1,2, Fang Zhang^1、**, Weilin Cheng¹, Zhiyuan Niu¹, and Huijie Huang^1,2、*

¹Laboratory of Information Optics and Optoelectronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

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Siyu Zhu, Baoxi Yang, Xiaozhe Ma, Fang Zhang, Weilin Cheng, Zhiyuan Niu, Huijie Huang. Research on High Energy Efficiency Pupil Correction Based on Multi-ring Partition in Photolithography Machine[J]. Chinese Journal of Lasers, 2021, 48(17): 1704001

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Paper Information

Category: Measurement and metrology

Received: Dec. 30, 2020

Accepted: Mar. 12, 2021

Published Online: Sep. 1, 2021

The Author Email: Zhang Fang (zhangfang@siom.ac.cn), Huang Huijie (huanghuijie@siom.ac.cn)

DOI:10.3788/CJL202148.1704001

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology