Acta Optica Sinica, Volume. 43, Issue 8, 0822015(2023)
Dynamic Multi-Interference Lithography Incorporating Modulated Optical Fourier Transform System
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Yan Ye, Yaqi Ma, Zhi Song, Chang Lu, Yishen Xu, Linsen Chen. Dynamic Multi-Interference Lithography Incorporating Modulated Optical Fourier Transform System[J]. Acta Optica Sinica, 2023, 43(8): 0822015
Category: Optical Design and Fabrication
Received: Oct. 28, 2022
Accepted: Dec. 2, 2022
Published Online: Apr. 6, 2023
The Author Email: Yishen Xu (xys2001@suda.edu.cn), Linsen Chen (lschen@suda.edu.cn)