Acta Optica Sinica, Volume. 43, Issue 8, 0822015(2023)

Dynamic Multi-Interference Lithography Incorporating Modulated Optical Fourier Transform System

Yan Ye1,2, Yaqi Ma1,2, Zhi Song1,2, Chang Lu1,2, Yishen Xu1,2、*, and Linsen Chen1,2、**
Author Affiliations
  • 1School of Optoelectronic Science and Engineering, Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215006, Jiangsu, China
  • 2Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province, Key Lab of Modern Optical Technologies of Education Ministry of China, Soochow University, Suzhou 215006, Jiangsu, China
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    Figures & Tables(11)
    Schematic diagram of optical Fourier transform system modulated by aperture diaphragm and phase element
    Equivalent geometrical light path for modulated Fourier transform system and geometrical light path of light imaged on optical axis. (a) Equivalent geometrical light path; (b) geometrical light path of light imaged on optical axis
    Fourier transform system jointly modulated by aperture diaphragm and space-variant phase element. (a) Equivalent geometrical light path; (b) schematic diagram of aperture diagraphm imaged on space-variant grating; (c) schematic diagram of symmetric distribution for aperture diaphragm and grating pixel
    Schematic diagram of planar segmented micro-grating and inversely designed aperture diaphragms. (a) Schematic diagram of planar segmented micro-grating with three frequencies; (b)-(d) inversely designed aperture diaphragms for segmented micro-grating with three frequencies
    Light field distributions on Fourier spectrum plane and imaging plane. (a)-(c) Light field distribution on Fourier spectrum plane; (d)-(f) light field distribution on Fourier imaging plane
    Structural diagram of spatial orientation grating and schematic diagram of phase element with orientation-variant grating. (a) Structural diagram of spatial orientation grating; (b) schematic diagram of phase element with orientation-variant grating
    Inversely designed aperture diaphragms and light field distribution on Fourier imaging plane obtained by joint modulation of inversely designed aperture diaphragms and orientation-variant gratings. (a)-(c) Inversely designed aperture diaphragms; (d)-(f) light field distribution on Fourier image plane
    Ray tracing on Fourier imaging plane before and after Zemax optimization. (a) Before optimization; (b) after optimization
    Detected light field on Fourier imaging plane. (a)-(c) Light field on imaging plane modulated by segmented aperture diaphragms and gratings; (d)-(f) light field on imaging plane modulated by interleaved aperture diaphragms and orientation-variant gratings
    Sample pictures measured by 3D laser confocal microscopy and scanning electron microscopy. (a)-(c) Sample pictures (magnification of 20); (d) pixel measurement results of space-variant nanostructures; (e) scanning electron microscope image of nano-grating
    • Table 1. Corresponding parameters for aperture diaphragms and phase elements

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      Table 1. Corresponding parameters for aperture diaphragms and phase elements

      Target pixelAperture diaphragmHolography optical element
      Frequency /(lp·mm-1Pixel diameter /mm×mmCentral position /mmPixel diameter /mm×mmFrequency /(lp·mm-1

      Distance /

      mm

      1761.71×1.71(-2.000 mm,7.126 mm),(-2.000 mm,3.126 mm),(0,5.126 mm),(0,-5.126 mm),(2.000 mm,3.126 mm),(2.000 mm,-7.126 mm)1.71×1.7120031.77
      2220.90×0.90(-2.000 mm,5.126 mm),(-2.000 mm,-5.126 mm),(0,3.126 mm),(0,-7.126 mm),(2.000 mm,-3.126 mm),(2.000 mm,7.126 mm)0.90×0.9040.13
      3020.33×0.33

      (-2.000 mm,3.126 mm),(-2.000 mm,-7.126 mm),(0,7.126 mm),(0,-3.126 mm)

      (2.000 mm,5.126 mm),(2.000 mm,-5.126 mm)

      0.33×0.3354.46
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    Yan Ye, Yaqi Ma, Zhi Song, Chang Lu, Yishen Xu, Linsen Chen. Dynamic Multi-Interference Lithography Incorporating Modulated Optical Fourier Transform System[J]. Acta Optica Sinica, 2023, 43(8): 0822015

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Oct. 28, 2022

    Accepted: Dec. 2, 2022

    Published Online: Apr. 6, 2023

    The Author Email: Yishen Xu (xys2001@suda.edu.cn), Linsen Chen (lschen@suda.edu.cn)

    DOI:10.3788/AOS221892

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