Design of Linear Dispersive Objective for Chromatic Confocal Displacement Sensor

Jing Ma; Yuejing Qi; Zengxiong Lu; Jiani Su; Guanghua Yang; Wei Qi; Qingyang Zhang; Jinxin Chen

doi:10.3788/CJL201946.0704009

Chinese Journal of Lasers, Volume. 46, Issue 7, 0704009(2019)

Design of Linear Dispersive Objective for Chromatic Confocal Displacement Sensor

Jing Ma^1,3, Yuejing Qi^2,3, Zengxiong Lu^2,3、*, Jiani Su², Guanghua Yang^2,3, Wei Qi², Qingyang Zhang², and Jinxin Chen²

Author Affiliations

¹ Academy of Opto-Electronics, Chinese Academy of Sciences, Beijing 100094, China

² Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China

³ School of Optoelectronics, University of Chinese Academy of Sciences, Beijing 100049, China

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References(17)

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Jing Ma, Yuejing Qi, Zengxiong Lu, Jiani Su, Guanghua Yang, Wei Qi, Qingyang Zhang, Jinxin Chen. Design of Linear Dispersive Objective for Chromatic Confocal Displacement Sensor[J]. Chinese Journal of Lasers, 2019, 46(7): 0704009

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Paper Information

Category: measurement and metrology

Received: Dec. 27, 2018

Accepted: Feb. 18, 2019

Published Online: Jul. 11, 2019

The Author Email: Lu Zengxiong (wlzengx103@163.com)

DOI:10.3788/CJL201946.0704009

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology