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Chinese Journal of Lasers, Volume. 46, Issue 7, 0704009(2019)

Design of Linear Dispersive Objective for Chromatic Confocal Displacement Sensor

Jing Ma1,3, Yuejing Qi2,3, Zengxiong Lu2,3、*, Jiani Su2, Guanghua Yang2,3, Wei Qi2, Qingyang Zhang2, and Jinxin Chen2
Author Affiliations
  • 1 Academy of Opto-Electronics, Chinese Academy of Sciences, Beijing 100094, China
  • 2 Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China
  • 3 School of Optoelectronics, University of Chinese Academy of Sciences, Beijing 100049, China
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    Article index updated: Mar. 11, 2025

    The article is cited by 6 article(s) CLP online library. (Some content might be in Chinese.)
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    Jing Ma, Yuejing Qi, Zengxiong Lu, Jiani Su, Guanghua Yang, Wei Qi, Qingyang Zhang, Jinxin Chen. Design of Linear Dispersive Objective for Chromatic Confocal Displacement Sensor[J]. Chinese Journal of Lasers, 2019, 46(7): 0704009

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    Paper Information

    Category: measurement and metrology

    Received: Dec. 27, 2018

    Accepted: Feb. 18, 2019

    Published Online: Jul. 11, 2019

    The Author Email: Lu Zengxiong (wlzengx103@163.com)

    DOI:10.3788/CJL201946.0704009

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology