Design of Linear Dispersive Objective for Chromatic Confocal Displacement Sensor

Jing Ma; Yuejing Qi; Zengxiong Lu; Jiani Su; Guanghua Yang; Wei Qi; Qingyang Zhang; Jinxin Chen

doi:10.3788/CJL201946.0704009

Chinese Journal of Lasers, Volume. 46, Issue 7, 0704009(2019)

Design of Linear Dispersive Objective for Chromatic Confocal Displacement Sensor

Jing Ma^1,3, Yuejing Qi^2,3, Zengxiong Lu^2,3、*, Jiani Su², Guanghua Yang^2,3, Wei Qi², Qingyang Zhang², and Jinxin Chen²

Author Affiliations

¹ Academy of Opto-Electronics, Chinese Academy of Sciences, Beijing 100094, China

² Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China

³ School of Optoelectronics, University of Chinese Academy of Sciences, Beijing 100049, China

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Figures & Tables(12)

Fig. 1. Working principle of chromatic confocal displacement sensor

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Fig. 2. Initial structure of dispersive objective

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Fig. 3. Structure of dispersive objective after optimization

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Fig. 4. Partial enlargement of dispersion range

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Fig. 5. Scatter diagram at each wavelength. (a) 450 nm; (b) 550 nm; (c) 650 nm

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Fig. 6. Curve of spherical aberration at each wavelength. (a) 450 nm; (b) 550 nm; (c) 650 nm

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Fig. 7. Fitting curve of wavelength-focus shift

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Fig. 8. Histogram of linear determination coefficient distributions

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Table 1. Combinations of glass materials that satisfy linear axial dispersion condition

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Table 1. Combinations of glass materials that satisfy linear axial dispersion condition

Parameter	Combination 1(N-KZFS11,N-SF66,N-PK52A)	Combination 2(N-KZFS11,N-PK51,N-SF66)	Combination 3(N-KZFS11,N-PK52A,N-SF66)	Combination 4(N-KZFS11,N-PK51A,N-SF66)	Combination 5(KZFS12,N-PK52A,N-SF66)
φ₁	0.1040	0.1040	0.1020	0.1080	0.1080
φ₂	-0.0367	-0.0347	-0.0347	-0.0367	-0.0247
φ₃	-0.0340	-0.0360	-0.0360	-0.0380	-0.0500
δs'_CF	1.0065	1.0000	1.0104	1.0532	1.0049
$\begin{matrix} \overset{N}{\sum_{i = 1}} \end{matrix} \begin{matrix} \frac{φ_{di}}{ν_{di}} \end{matrix}$ R_λi	0.000000009	0.000000172	0.000000602	0.000000619	0.000000766

Table 2. Glass parameters in combination 1
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Table 2. Glass parameters in combination 1
Material N-KZFS11 N-SF66 N-PK52A
Refractive index 1.6377 1.9229 1.4970
Abbe number 42.41 20.88 81.61
Optical power 0.1040 -0.0367 -0.0340

Table 3. Lens parameters for each dispersive objective

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Table 3. Lens parameters for each dispersive objective

Lens number	Glass	Optical power	Radius of frontsurface /mm	Radius of backsurface /mm	Thickness /mm
1	N-SF66	-0.0183	-101.158	101.158	2
2	N-PK52A	-0.0170	-58.801	58.801	2
3	N-KZFS11	0.0347	35.790	-35.790	5
4	N-SF66	-0.0183	127.147	35.790	2
5	N-KZFS11	0.0347	35.790	-35.790	5
6	N-KZFS11	0.0347	35.790	-35.790	5
7	N-PK52A	-0.0170	-35.790	162.592	2

Table 4. Results of Monte Carlo analysis

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Table 4. Results of Monte Carlo analysis

Wavelength /μm	Radius ofAiry spot /μm	Less than 90%of spot radiusin Monte Carloanalysis /μm
0.45	1.138	1.09199
0.47	1.189	1.12103
0.49	1.240	1.19069
0.51	1.290	1.12016
0.53	1.341	1.17195
0.55	1.391	1.17152
0.57	1.442	1.26518
0.59	1.493	1.13704
0.61	1.543	1.16347
0.63	1.594	1.22053
0.65	1.644	1.20372

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Jing Ma, Yuejing Qi, Zengxiong Lu, Jiani Su, Guanghua Yang, Wei Qi, Qingyang Zhang, Jinxin Chen. Design of Linear Dispersive Objective for Chromatic Confocal Displacement Sensor[J]. Chinese Journal of Lasers, 2019, 46(7): 0704009

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