Chinese Journal of Lasers, Volume. 46, Issue 7, 0704009(2019)

Design of Linear Dispersive Objective for Chromatic Confocal Displacement Sensor

Jing Ma1,3, Yuejing Qi2,3, Zengxiong Lu2,3、*, Jiani Su2, Guanghua Yang2,3, Wei Qi2, Qingyang Zhang2, and Jinxin Chen2
Author Affiliations
  • 1 Academy of Opto-Electronics, Chinese Academy of Sciences, Beijing 100094, China
  • 2 Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China
  • 3 School of Optoelectronics, University of Chinese Academy of Sciences, Beijing 100049, China
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    In this study, the working principle of the chromatic confocal displacement sensor and the conditions of linear axial dispersion were applied for the optimal selection of three kinds of glass materials, namely N-KZFS11, N-SF66, and N-PK52A, which were combined with the theory of aberration to design the initial structure of a linear dispersive objective composed of three single lenses and two double cemented lenses. Then, the Zemax software was used to optimize the initial structure of the dispersive objective and analyze its tolerance. The results indicate that within the wavelength range from 450 nm to 650 nm, the blur spot at each wavelength is much smaller than the Airy spot. The measurement range of the dispersive objective is up to 1.05 mm, the linear determination coefficient R2 between the axial dispersion and wavelength is 0.997, and the theoretical resolution could reach 105 nm.

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    Jing Ma, Yuejing Qi, Zengxiong Lu, Jiani Su, Guanghua Yang, Wei Qi, Qingyang Zhang, Jinxin Chen. Design of Linear Dispersive Objective for Chromatic Confocal Displacement Sensor[J]. Chinese Journal of Lasers, 2019, 46(7): 0704009

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    Paper Information

    Category: measurement and metrology

    Received: Dec. 27, 2018

    Accepted: Feb. 18, 2019

    Published Online: Jul. 11, 2019

    The Author Email: Lu Zengxiong (wlzengx103@163.com)

    DOI:10.3788/CJL201946.0704009

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