Laser & Optoelectronics Progress, Volume. 58, Issue 11, 1131001(2021)
Film Thickness Error in Electron Beam Evaporation with Revolving Structure
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Ganghua Bao, Ben Wang, Yujiang Xie, Yu Liang. Film Thickness Error in Electron Beam Evaporation with Revolving Structure[J]. Laser & Optoelectronics Progress, 2021, 58(11): 1131001
Category: Thin Films
Received: Sep. 16, 2020
Accepted: Dec. 2, 2020
Published Online: Jun. 7, 2021
The Author Email: Ganghua Bao (bgh@mfoptics.com)