Laser & Optoelectronics Progress, Volume. 58, Issue 11, 1131001(2021)
Film Thickness Error in Electron Beam Evaporation with Revolving Structure
Figures & Tables(8)
Fig. 5. Spectral curves of different locations with different ρ values. (a) ρ=0.6 m； (b) ρ=1.2 m
Table 1. Parameters of thin film coater with 2700 mm diameter
View tableTable 1. Parameters of thin film coater with 2700 mm diameter
Parameter Diameter of vacuum
chamber /mm
R /m L /m H /m n Value 2700 2.600 0.900 1.650 2.5
Table 2. Uniform thickness distribution of thin films
View tableTable 2. Uniform thickness distribution of thin films
ρ /m Sample number MgF2 film thickness /nm Al2O3 film thickness / nm 0.6 1 223 186 1.2 1# 221 185
Table 3. MgF2 thickness errors at different positions
View tableTable 3. MgF2 thickness errors at different positions
ρ /m Peak reflectivity /% Inversion error /nm Minimum Maximum 0.6 6.69 7.48 5.3 1.2 6.41 7.52 7.0
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Ganghua Bao, Ben Wang, Yujiang Xie, Yu Liang. Film Thickness Error in Electron Beam Evaporation with Revolving Structure[J]. Laser & Optoelectronics Progress, 2021, 58(11): 1131001
Paper Information
Category: Thin Films
Received: Sep. 16, 2020
Accepted: Dec. 2, 2020
Published Online: Jun. 7, 2021
The Author Email: Ganghua Bao (bgh@mfoptics.com)
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