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Chinese Journal of Lasers, Volume. 41, Issue 5, 508006(2014)

System Errors Analysis of Grating Lateral Shearing Interferometer

Li Jie1,2、*, Tang Feng1, Wang Xiangzhao1, Dai Fengzhao1, and Feng Peng1
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    Li Jie, Tang Feng, Wang Xiangzhao, Dai Fengzhao, Feng Peng. System Errors Analysis of Grating Lateral Shearing Interferometer[J]. Chinese Journal of Lasers, 2014, 41(5): 508006

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    Paper Information

    Category: measurement and metrology

    Received: Nov. 13, 2013

    Accepted: --

    Published Online: Apr. 9, 2014

    The Author Email: Li Jie (ljieleej@siom.ac.cn)

    DOI:10.3788/cjl201441.0508006

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology