Chinese Journal of Lasers, Volume. 41, Issue 5, 508006(2014)
System Errors Analysis of Grating Lateral Shearing Interferometer
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Li Jie, Tang Feng, Wang Xiangzhao, Dai Fengzhao, Feng Peng. System Errors Analysis of Grating Lateral Shearing Interferometer[J]. Chinese Journal of Lasers, 2014, 41(5): 508006
Category: measurement and metrology
Received: Nov. 13, 2013
Accepted: --
Published Online: Apr. 9, 2014
The Author Email: Li Jie (ljieleej@siom.ac.cn)