Real-time surface figure monitoring of optical elements in continuous polishing

Jun Chen; Xueke Xu; Chaoyang Wei; Minghong Yang; Jianxun Gu; Jianda Shao

doi:10.3788/COL201513.032201

Chinese Optics Letters, Volume. 13, Issue 3, 032201(2015)

Real-time surface figure monitoring of optical elements in continuous polishing

Jun Chen, Xueke Xu^*, Chaoyang Wei, Minghong Yang, Jianxun Gu, and Jianda Shao

Author Affiliations

Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

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References(15)

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CLP Journals

[1] Chen Li, Yongying Yang, Huiting Chai, Yihui Zhang, Fan Wu, Lin Zhou, Kai Yan, Jian Bai, Yibing Shen, Qiao Xu, Hongzhen Jiang, Xu Liu, "Dark-field detection method of shallow scratches on the super-smooth optical surface based on the technology of adaptive smoothing and morphological differencing," Chin. Opt. Lett. 15, 081202 (2017)

Cited By

[1] Chao Wang, Peng Wang, Xueqiang Liu, Lili Hu, Liyan Zhang. Influence of chemical polishing on fluorophosphate fiber preform. Ceramics International, 42, 5629(2016).

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Jun Chen, Xueke Xu, Chaoyang Wei, Minghong Yang, Jianxun Gu, Jianda Shao, "Real-time surface figure monitoring of optical elements in continuous polishing," Chin. Opt. Lett. 13, 032201 (2015)

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Paper Information

Category: Optical Design and Fabrication

Received: Sep. 9, 2014

Accepted: Nov. 28, 2014

Published Online: Sep. 25, 2018

The Author Email: Xueke Xu (xuxk@opfilm.com)

DOI:10.3788/COL201513.032201

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology