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Chinese Optics Letters, Volume. 13, Issue 3, 032201(2015)

Real-time surface figure monitoring of optical elements in continuous polishing

Jun Chen, Xueke Xu*, Chaoyang Wei, Minghong Yang, Jianxun Gu, and Jianda Shao
Author Affiliations
  • Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
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    Jun Chen, Xueke Xu, Chaoyang Wei, Minghong Yang, Jianxun Gu, Jianda Shao, "Real-time surface figure monitoring of optical elements in continuous polishing," Chin. Opt. Lett. 13, 032201 (2015)

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Sep. 9, 2014

    Accepted: Nov. 28, 2014

    Published Online: Sep. 25, 2018

    The Author Email: Xueke Xu (xuxk@opfilm.com)

    DOI:10.3788/COL201513.032201

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology