Chinese Optics Letters, Volume. 19, Issue 10, 101201(2021)
Generic nonlinear error compensation algorithm for phase measuring profilometry
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Xin Yu, Shanshan Lai, Yuankun Liu, Wenjing Chen, Junpeng Xue, Qican Zhang, "Generic nonlinear error compensation algorithm for phase measuring profilometry," Chin. Opt. Lett. 19, 101201 (2021)
Category: Instrumentation, Measurement, and Optical Sensing
Received: Jan. 24, 2021
Accepted: Mar. 17, 2021
Posted: Mar. 18, 2021
Published Online: Aug. 16, 2021
The Author Email: Yuankun Liu (lyk@scu.edu.cn)