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Chinese Optics Letters, Volume. 19, Issue 10, 101201(2021)

Generic nonlinear error compensation algorithm for phase measuring profilometry

Xin Yu1, Shanshan Lai1, Yuankun Liu1、*, Wenjing Chen1, Junpeng Xue1,2, and Qican Zhang1
Author Affiliations
  • 1Opto-Electronic Department, Sichuan University, Chengdu 610065, China
  • 2School of Aeronautics and Astronautics, Sichuan University, Chengdu 610065, China
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    Citation counts are provided from Web of Science. The counts may vary by service, and are reliant on the availability of their data.
    The article is cited by 21 article(s) from Web of Science.
    The article is cited by 5 article(s) CLP online library. (Some content might be in Chinese.)
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    Xin Yu, Shanshan Lai, Yuankun Liu, Wenjing Chen, Junpeng Xue, Qican Zhang, "Generic nonlinear error compensation algorithm for phase measuring profilometry," Chin. Opt. Lett. 19, 101201 (2021)

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    Paper Information

    Category: Instrumentation, Measurement, and Optical Sensing

    Received: Jan. 24, 2021

    Accepted: Mar. 17, 2021

    Posted: Mar. 18, 2021

    Published Online: Aug. 16, 2021

    The Author Email: Yuankun Liu (lyk@scu.edu.cn)

    DOI:10.3788/COL202119.101201

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology