Chinese Optics Letters, Volume. 19, Issue 10, 101201(2021)
Generic nonlinear error compensation algorithm for phase measuring profilometry
Figures & Tables(9)
Fig. 2. Nonlinear effect for (a) the wrapped phase and (b) the PDF curves.
Fig. 3. In the cases of different values of M: (a) PDF curves and (b) partial phase sampling regions.
Fig. 5. Measurement results: (a) captured fringe image, (b) the real PDF, (c) the comparison result of real and simulated PDF curves, and (d) the correlation curve.
Fig. 6. Comparisons of these two methods: (a) the residual phase error and (b) the PDF curves.
Fig. 7. Measurement results of a pulp mask: (a) without compensation, (b) compensated by our previous work, and (c) compensated by the proposed method.
Table 1. Quantitative Comparison Results of the Measurement by Two Methods
View tableView in ArticleTable 1. Quantitative Comparison Results of the Measurement by Two Methods
Original Our Previous Work Proposed Algorithm Coefficients (C1 and C2/K2) – (0.2340, −0.0240) 0.2400 STD of the phase errors (rad) 0.1699 0.0129 0.0125 Processing time (s) – 329.36 0.12
Table 2. Quantitative Comparison Results of the Object Measurement by Two Methods
View tableView in ArticleTable 2. Quantitative Comparison Results of the Object Measurement by Two Methods
Original Our Previous Work Proposed Algorithm Coefficients (C1 and C2/K2) – (0.2270, −0.0220) 0.2300 STD of the phase errors (rad) 0.1662 0.0226 0.0222 Processing time (s) – 331.06 0.12
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Xin Yu, Shanshan Lai, Yuankun Liu, Wenjing Chen, Junpeng Xue, Qican Zhang, "Generic nonlinear error compensation algorithm for phase measuring profilometry," Chin. Opt. Lett. 19, 101201 (2021)
Paper Information
Category: Instrumentation, Measurement, and Optical Sensing
Received: Jan. 24, 2021
Accepted: Mar. 17, 2021
Posted: Mar. 18, 2021
Published Online: Aug. 16, 2021
The Author Email: Yuankun Liu (lyk@scu.edu.cn)
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