Laser & Optoelectronics Progress, Volume. 62, Issue 7, 0712003(2025)
Rotating Measurement Method for Inner Hole Parameters with Large Depth-to-Diameter Ratio Based on Spectral Confocal Principle
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Rui Ma, Borong Wu, Baowen Li, Xinghui Li. Rotating Measurement Method for Inner Hole Parameters with Large Depth-to-Diameter Ratio Based on Spectral Confocal Principle[J]. Laser & Optoelectronics Progress, 2025, 62(7): 0712003
Category: Instrumentation, Measurement and Metrology
Received: Nov. 5, 2024
Accepted: Dec. 25, 2024
Published Online: Mar. 17, 2025
The Author Email: Xinghui Li (li.xinghui@sz.tsinghua.edu.cn)
CSTR:32186.14.LOP242214