Laser & Optoelectronics Progress, Volume. 62, Issue 7, 0712003(2025)

Rotating Measurement Method for Inner Hole Parameters with Large Depth-to-Diameter Ratio Based on Spectral Confocal Principle

Rui Ma1, Borong Wu2, Baowen Li1, and Xinghui Li1,3、*
Author Affiliations
  • 1Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, Guangdong , China
  • 2Chongqing University-University of Cincinnati Joint Co-op Institute, Chongqing University, Chongqing 400044, China
  • 3Tsinghua-Berkeley Shenzhen Institute, Shenzhen 518055, Guangdong , China
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    Rui Ma, Borong Wu, Baowen Li, Xinghui Li. Rotating Measurement Method for Inner Hole Parameters with Large Depth-to-Diameter Ratio Based on Spectral Confocal Principle[J]. Laser & Optoelectronics Progress, 2025, 62(7): 0712003

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Nov. 5, 2024

    Accepted: Dec. 25, 2024

    Published Online: Mar. 17, 2025

    The Author Email: Xinghui Li (li.xinghui@sz.tsinghua.edu.cn)

    DOI:10.3788/LOP242214

    CSTR:32186.14.LOP242214

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