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Laser & Optoelectronics Progress, Volume. 62, Issue 7, 0712003(2025)

Rotating Measurement Method for Inner Hole Parameters with Large Depth-to-Diameter Ratio Based on Spectral Confocal Principle

Rui Ma1, Borong Wu2, Baowen Li1, and Xinghui Li1,3、*
Author Affiliations
  • 1Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, Guangdong , China
  • 2Chongqing University-University of Cincinnati Joint Co-op Institute, Chongqing University, Chongqing 400044, China
  • 3Tsinghua-Berkeley Shenzhen Institute, Shenzhen 518055, Guangdong , China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (9)
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    References (46)
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    Figures & Tables(9)
    Measurement system for inner hole parameters based on spectral confocal principle. (a) Designed system; (b) spectral confocal principle; (c) helical scan trajectory; (d) solving perpendicularity; (e) fit the center coordinates

    Fig. 1. Measurement system for inner hole parameters based on spectral confocal principle. (a) Designed system; (b) spectral confocal principle; (c) helical scan trajectory; (d) solving perpendicularity; (e) fit the center coordinates

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    Principle of circle fitting by spectral confocal data

    Fig. 2. Principle of circle fitting by spectral confocal data

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    Measure device for inner hole parameters based on spectral confocal principle. (a) Front of measurement system; (b) back of measurement system

    Fig. 3. Measure device for inner hole parameters based on spectral confocal principle. (a) Front of measurement system; (b) back of measurement system

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    Influence of rotation velocity on the scanning trajectory of the inner hole profile. (a) 20 (°)/s; (b) 40 (°)/s; (c) 80 (°)/s; (d) 200 (°)/s; (e) 400 (°)/s; (f) 800 (°)/s

    Fig. 4. Influence of rotation velocity on the scanning trajectory of the inner hole profile. (a) 20 (°)/s; (b) 40 (°)/s; (c) 80 (°)/s; (d) 200 (°)/s; (e) 400 (°)/s; (f) 800 (°)/s

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    Influence of rotation velocity on measurement result of inner hole radius

    Fig. 5. Influence of rotation velocity on measurement result of inner hole radius

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    Fitted radii of the inner holes

    Fig. 6. Fitted radii of the inner holes

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    Distributions of fitted circle centers

    Fig. 7. Distributions of fitted circle centers

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    Distribution of perpendicularities

    Fig. 8. Distribution of perpendicularities

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    • Table 1. Experimental parameter setting of inner hole workpiece

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      Table 1. Experimental parameter setting of inner hole workpiece

      No.Sampling frequency /HzNumber of pointsRotating moduleMoving module
      Rotation velocity /［（°）·s-1］Rotation angleRotation time /sMoving velocity /（mm·s-1）Moving time /sMoving displacement /mm
      11001080020（+360°， -360°）×3108.02120240
      22001080040（+360°， -360°）×354.0460240
      34002160040（+360°， -360°）×354.0460240
      44001080080（+360°， -360°）×327.0830240
      510002700080（+360°， -360°）×327.0830240
      6100010800200（+360°， -360°）×310.82012240
      7200021600200（+360°， -360°）×310.82012240
      8200010800400（+360°， -360°）×35.4406240
      920007200600（+360°， -360°）×33.6604240
      1020005400800（+360°， -360°）×32.7803240
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    Rui Ma, Borong Wu, Baowen Li, Xinghui Li. Rotating Measurement Method for Inner Hole Parameters with Large Depth-to-Diameter Ratio Based on Spectral Confocal Principle[J]. Laser & Optoelectronics Progress, 2025, 62(7): 0712003

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Nov. 5, 2024

    Accepted: Dec. 25, 2024

    Published Online: Mar. 17, 2025

    The Author Email: Xinghui Li (li.xinghui@sz.tsinghua.edu.cn)

    DOI:10.3788/LOP242214

    CSTR:32186.14.LOP242214

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology