Rotating Measurement Method for Inner Hole Parameters with Large Depth-to-Diameter Ratio Based on Spectral Confocal Principle

Rui Ma; Borong Wu; Baowen Li; Xinghui Li

doi:10.3788/LOP242214

Laser & Optoelectronics Progress, Volume. 62, Issue 7, 0712003(2025)

Rotating Measurement Method for Inner Hole Parameters with Large Depth-to-Diameter Ratio Based on Spectral Confocal Principle

Rui Ma¹, Borong Wu², Baowen Li¹, and Xinghui Li^1,3、*

Author Affiliations

¹Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, Guangdong , China

²Chongqing University-University of Cincinnati Joint Co-op Institute, Chongqing University, Chongqing 400044, China

³Tsinghua-Berkeley Shenzhen Institute, Shenzhen 518055, Guangdong , China

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Rui Ma, Borong Wu, Baowen Li, Xinghui Li. Rotating Measurement Method for Inner Hole Parameters with Large Depth-to-Diameter Ratio Based on Spectral Confocal Principle[J]. Laser & Optoelectronics Progress, 2025, 62(7): 0712003

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: Nov. 5, 2024

Accepted: Dec. 25, 2024

Published Online: Mar. 17, 2025

The Author Email: Xinghui Li (li.xinghui@sz.tsinghua.edu.cn)

DOI:10.3788/LOP242214

CSTR:32186.14.LOP242214

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology