White light interferometry with spectral-temporal demodulation for large-range thickness measurement

Yunlong Zhu; Zhuoran Li; Xu Lu; Yonggui Yuan; Jun Yang

doi:10.3788/COL202220.091201

Chinese Optics Letters, Volume. 20, Issue 9, 091201(2022)

White light interferometry with spectral-temporal demodulation for large-range thickness measurement

Yunlong Zhu^1,2, Zhuoran Li^1,2, Xu Lu^1,2, Yonggui Yuan^1,2、*, and Jun Yang^2,3,4、**

¹Key Laboratory of In-fiber Integrated Optics, Ministry of Education of China, Harbin Engineering University, Harbin 150001, China

²College of Physics and Optoelectronic Engineering, Harbin Engineering University, Harbin 150001, China

³Guangdong Provincial Key Laboratory of Information Photonics Technology (Guangdong University of Technology), Guangzhou 510006, China

⁴School of Information Engineering, Guangdong University of Technology, Guangzhou 510008, China

show less

References(19)

[1] X. Tian, W. Zhou, K. Ren, C. Zhang, X. Liu, G. Xue, J. Duan, X. Cai, X. Hu, Y. Gong, Z. Xie, S. Zhu. Effect of dimension variation for second-harmonic generation in lithium niobate on insulator waveguide. Chin. Opt. Lett., 19, 060015(2021).

[2] . ME-L Mueller matrix ellipsometer.

[3] Y. S. Ghim, S. W. Kim. Spectrally resolved white-light interferometry for 3D inspection of a thin-film layer structure. Appl. Opt., 48, 799(2009).

[4] Y. Yang, H. Yan, S. Li, F. Yang, W. Jin. Estimation of gyro bias drift due to distributed polarization cross coupling in the fiber coil. Opt. Express, 27, 10247(2019).

[5] H. Yoshino, A. Abbas, P. M. Kaminski, R. Smith, J. M. Walls, D. Mansfield. Measurement of thin film interfacial surface roughness by coherence scanning interferometry. J. Appl. Phys., 121, 105303(2017).

[6] H. Yoshino, R. Smith, J. M. Walls, D. Mansfield. The development of thin film metrology by coherence scanning interferometry. Proc. SPIE, 9749, 97490P(2016).

[7] H. Yoshino, J. M. Walls, R. Smith. Interfacial surface roughness determination by coherence scanning interferometry using noise compensation. Appl. Opt., 56, 4757(2017).

[8] H. Yoshino, P. M. Kaminski, R. Smith, J. M. Walls, D. Mansfield. Refractive index determination by coherence scanning interferometry. Appl. Opt., 55, 4253(2016).

[9] M. F. Fay, T. Dresel. Applications of model-based transparent surface films analysis using coherence-scanning interferometry. Opt. Eng., 56, 111709(2017).

[10] Y. S. Ghim, S. W. Kim. Fast, precise, tomographic measurements of thin films. Appl. Phys. Lett., 91, 091903(2007).

[11] Y. S. Ghim, H. G. Rhee, H. S. Yang, Y. W. Lee. Thin-film thickness profile measurement using a Mirau-type low-coherence interferometer. Meas. Sci. Technol., 24, 075002(2013).

[12] K. Xue, J. Wang, Y. Zhao, Z. Xiao. Measurement of glass thickness and refractive index based on spectral interference technology. Appl. Opt., 60, 7983(2021).

[13] Y. Du, H. Yan, Y. Wu, X. Yao, Y. Nie, B. Shi. Non-contact thickness measurement for ultra-thin metal foils with differential white light interferometry. Chin. Opt. Lett., 2, 701(2004).

[14] P. J. de Groot, X. C. de Lega, M. F. Fay. Transparent film profiling and analysis by interference microscopy. Proc. SPIE, 7064, 70640I(2008).

[15] S. W. Kim, G. H. Kim. Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry. Appl. Opt., 38, 5968(1999).

[16] X. Lu, Y. Yuan, C. Ma, H. Zhu, Y. Zhu, Z. Yu, X. Zhang, F. Jiang, J. Zhang, H. Li, J. Yang, L. Yuan. Self-calibrated absolute thickness measurement of opaque specimen based on differential white light interferometry. IEEE Trans. Instrum. Meas., 69, 2507(2020).

[17] K. Madsen, H. B. Nielsen, O. Tingleff. Methods for non-linear least squares problems(2004).

[18] S. S. C. Chim, G. S. Kino. Three-dimensional image realization in interference microscopy. Appl. Opt., 31, 2550(1992).

[19] P. Hlubina, D. Ciprian, J. Luňáňek, M. Lesňák. Dispersive white-light spectral interferometry with absolute phase retrieval to measure thin film. Opt. Express, 14, 7678(2006).

Cited By