White light interferometry with spectral-temporal demodulation for large-range thickness measurement

Yunlong Zhu; Zhuoran Li; Xu Lu; Yonggui Yuan; Jun Yang

doi:10.3788/COL202220.091201

Chinese Optics Letters, Volume. 20, Issue 9, 091201(2022)

White light interferometry with spectral-temporal demodulation for large-range thickness measurement

Yunlong Zhu^1,2, Zhuoran Li^1,2, Xu Lu^1,2, Yonggui Yuan^1,2、*, and Jun Yang^2,3,4、**

¹Key Laboratory of In-fiber Integrated Optics, Ministry of Education of China, Harbin Engineering University, Harbin 150001, China

²College of Physics and Optoelectronic Engineering, Harbin Engineering University, Harbin 150001, China

³Guangdong Provincial Key Laboratory of Information Photonics Technology (Guangdong University of Technology), Guangzhou 510006, China

⁴School of Information Engineering, Guangdong University of Technology, Guangzhou 510008, China

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Yunlong Zhu, Zhuoran Li, Xu Lu, Yonggui Yuan, Jun Yang, "White light interferometry with spectral-temporal demodulation for large-range thickness measurement," Chin. Opt. Lett. 20, 091201 (2022)

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Paper Information

Category: Instrumentation, Measurement, and Optical Sensing

Received: Feb. 2, 2022

Accepted: May. 17, 2022

Posted: May. 18, 2022

Published Online: Jun. 16, 2022

The Author Email: Yonggui Yuan (yuanyonggui@aliyun.com), Jun Yang (yangj@gdut.edu.cn)

DOI:10.3788/COL202220.091201

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