Thin films play important roles in the fields of semiconductors, optoelectronics, integrated optics, etc. Following the increasing demand on thin film quality[
Chinese Optics Letters, Volume. 20, Issue 9, 091201(2022)
White light interferometry with spectral-temporal demodulation for large-range thickness measurement
Film thickness measurement can be realized using white light interferometry, but it is challenging to guarantee high precision in a large range of thicknesses. Based on scanning white light interferometry, we propose a spectral-temporal demodulation scheme for large-range thickness measurement. The demodulation process remains unchanged for either coatings or substrate-free films, while some adjustments are made according to the estimated optical thickness. Experiments show that the single-point repeatabilities for 500 nm
1. Introduction
Thin films play important roles in the fields of semiconductors, optoelectronics, integrated optics, etc. Following the increasing demand on thin film quality[
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Yunlong Zhu, Zhuoran Li, Xu Lu, Yonggui Yuan, Jun Yang. White light interferometry with spectral-temporal demodulation for large-range thickness measurement[J]. Chinese Optics Letters, 2022, 20(9): 091201
Category: Instrumentation, Measurement, and Optical Sensing
Received: Feb. 2, 2022
Accepted: May. 17, 2022
Posted: May. 18, 2022
Published Online: Jun. 16, 2022
The Author Email: Yonggui Yuan (yuanyonggui@aliyun.com), Jun Yang (yangj@gdut.edu.cn)