Dry-etched ultrahigh-<i>Q</i> silica microdisk resonators on a silicon chip

Jiaxin Gu; Jie Liu; Ziqi Bai; Han Wang; Xinyu Cheng; Guanyu Li; Menghua Zhang; Xinxin Li; Qi Shi; Min Xiao; Xiaoshun Jiang

doi:10.1364/PRJ.412840

Photonics Research, Volume. 9, Issue 5, 722(2021)

Dry-etched ultrahigh-Q silica microdisk resonators on a silicon chip

Jiaxin Gu¹, Jie Liu¹, Ziqi Bai¹, Han Wang¹, Xinyu Cheng¹, Guanyu Li¹, Menghua Zhang¹, Xinxin Li¹, Qi Shi¹, Min Xiao^1,2, and Xiaoshun Jiang^1、*

Author Affiliations

¹National Laboratory of Solid State Microstructures, College of Engineering and Applied Science and School of Physics, Nanjing University, Nanjing 210093, China

²Department of Physics, University of Arkansas, Fayetteville, Arkansas 72701, USA

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Jiaxin Gu, Jie Liu, Ziqi Bai, Han Wang, Xinyu Cheng, Guanyu Li, Menghua Zhang, Xinxin Li, Qi Shi, Min Xiao, Xiaoshun Jiang, "Dry-etched ultrahigh-Q silica microdisk resonators on a silicon chip," Photonics Res. 9, 722 (2021)

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Paper Information

Category: Integrated Optics

Received: Oct. 19, 2020

Accepted: Feb. 11, 2021

Published Online: Apr. 26, 2021

The Author Email: Xiaoshun Jiang (jxs@nju.edu.cn)

DOI:10.1364/PRJ.412840

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology