[1] Ungula J, Dejene B F, Swart H C. Band gap engineering, enhanced morphology and photoluminescence of un-doped, Ga and/or Al-doped ZnO nanoparticles by reflux precipitation method[J]. Journal of Luminescence, 195, 54-60(2018).

[2] Shao J Z, Wang X, Hu H T et al. Thermal effect simulation analysis on excimer laser annealing of zinc oxide thin films[J]. Laser & Optoelectronics Progress, 54, 061401(2017).

[3] Muchuweni E, Sathiaraj T S, Nyakotyo H. Hydrothermal synthesis of ZnO nanowires on RF sputtered Ga and Al co-doped ZnO thin films for solar cell application[J]. Journal of Alloys and Compounds, 721, 45-54(2017). http://www.sciencedirect.com/science/article/pii/S0925838817319436

[4] Yoshida Y, Tanaka S, Hiromitsu I et al. Ga-doped ZnO film as a transparent electrode for phthalocyanine/perylene heterojunction solar cell[J]. Japanese Journal of Applied Physics, 47, 867-871(2008). http://adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2008JaJAP..47..867Y&db_key=PHY&link_type=ABSTRACT&high=20643

[5] Su X Q, Wang L, Chen J B et al. Properties of ZnO thin films with effect of substrate temperature by PLD[J]. Acta Photonica Sinica, 39, 296-300(2010).

[6] Wang F H, Chen K N, Hsu C M et al. Investigation of the structural, electrical, and optical properties of the nano-scale GZO thin films on glass and flexible polyimide substrates[J]. Nanomaterials, 6, 88(2016). http://europepmc.org/articles/PMC5302505/

[7] Chen Y Y, Juang J Y. Enhancement of Ga-doped zinc oxide film properties and deposition rate by multiple deposition using atmosphere pressure plasma jet[J]. Journal of Alloys and Compounds, 694, 452-458(2017).

[8] Liau L C K, Huang J S. Effect of indium- and gallium-doped ZnO fabricated through sol-gel processing on energy level variations[J]. Materials Research Bulletin, 97, 6-12(2018). http://www.sciencedirect.com/science/article/pii/S0025540817320627

[9] Shewale P S, Lee S H, Yu Y S. Pulse repetition rate dependent structural, surface morphological and optoelectronic properties of Ga-doped ZnO thin films grown by pulsed laser deposition[J]. Journal of Alloys and Compounds, 725, 1106-1114(2017).

[10] Ko Y D, Kim K C, Kim Y S. Effects of substrate temperature on the Ga-doped ZnO films as an anode material of organic light emitting diodes[J]. Superlattices and Microstructures, 51, 933-941(2012). http://www.sciencedirect.com/science/article/pii/S0749603612000729

[11] Mahdhi H, Alaya S, Gauffier J L et al. Influence of thickness on the structural, optical and electrical properties of Ga-doped ZnO thin films deposited by sputtering magnetron[J]. Journal of Alloys and Compounds, 695, 697-703(2017).

[12] Ebrahimifard R, Golobostanfard M R, Abdizadeh H. Sol-gel derived Al and Ga co-doped ZnO thin films: an optoelectronic study[J]. Applied Surface Science, 290, 252-259(2014). http://www.sciencedirect.com/science/article/pii/S0169433213021405

[13] Wang H L, Sun Y H, Fang L et al. Growth and characterization of high transmittance GZO films prepared by sol-gel method[J]. Thin Solid Films, 615, 19-24(2016). http://www.sciencedirect.com/science/article/pii/S0040609016302929

[14] Muchuweni E, Sathiaraj T S, Nyakotyo H. Effect of gallium doping on the structural, optical and electrical properties of zinc oxide thin films prepared by spray pyrolysis[J]. Ceramics International, 42, 10066-10070(2016). http://www.sciencedirect.com/science/article/pii/S0272884216302449

[15] El-Desoky M M, Ali M A, Afifi G et al. . Annealing effects on the structural and optical properties of growth ZnO thin films fabricated by pulsed laser deposition (PLD)[J]. Journal of Materials Science: Materials in Electronics, 25, 5071-5077(2014). http://link.springer.com/article/10.1007/s10854-014-2273-8

[16] Han S, Shao Y K, Lu Y M et al. Effect of different migration energy for reaction atoms on growth orientation and optical absorption characteristics of cubic MgZnO thin films under different pressure by PLD method[J]. Journal of Crystal Growth, 408, 125-128(2014). http://www.sciencedirect.com/science/article/pii/S0022024814006411

[17] Shinde S D, Deshmukh A V, Date S K et al. Effect of Ga doping on micro/structural, electrical and optical properties of pulsed laser deposited ZnO thin films[J]. Thin Solid Films, 520, 1212-1217(2011). http://www.sciencedirect.com/science/article/pii/S004060901101371X?_rdoc=11&_fmt=high&_origin=browse&_srch=hubEid(1-s2.0-S0040609011X00263)&_docanchor=&_ct=40&_refLink=Y&_zone=rslt_list_item&md5=04edfce0310dca68cdcd4541fdb7fc37

[18] Kim J H, Koo S M. Effect of epitaxial growth on electrical properties of Ga-doped ZnO thin films[J]. Ceramics International, 41, 37-42(2015).

[19] Jen S U, Sun H, Chiang H P et al. Optoelectronic properties and the electrical stability of Ga-doped ZnO thin films prepared via radio frequency sputtering[J]. Materials, 9, E987(2016). http://pubmedcentralcanada.ca/pmcc/articles/PMC5457010/

[20] Shewale P S, Lee S H, Yu Y S. UV sensitive pulsed laser deposited ZnO thin films: influence of growth temperature[J]. Journal of Alloys and Compounds, 744, 849-858(2018). http://www.sciencedirect.com/science/article/pii/S0925838818305863

[21] Zou Y S, Wang S L, Yang H et al. Effect of substrate temperature on microstructure and optical properties of Ga doped ZnO films deposited by pulsed laser deposition[J]. Surface Engineering, 31, 302-307(2015). http://www.tandfonline.com/doi/abs/10.1179/1743294414Y.0000000440

[22] Akin N, Kinaci B, Ozen Y et al. Influence of RF power on the opto-electrical and structural properties of gallium-doped zinc oxide thin films[J]. Journal of Materials Science: Materials in Electronics, 28, 7376-7384(2017). http://link.springer.com/10.1007/s10854-017-6426-4

[23] Garg V, Sengar B S, Awasthi V et al. Investigation of dual-ion beam sputter-instigated plasmon generation in TCOs: a case study of GZO[J]. ACS Applied Materials & Interfaces, 10, 5464-5474(2018). http://www.ncbi.nlm.nih.gov/pubmed/29356500

[24] Hsu F H, Wang N F, Tsai Y Z et al. A novel Al and Y codoped ZnO/n-Si heterojunction solar cells fabricated by pulsed laser deposition[J]. Solar Energy, 86, 3146-3152(2012). http://www.sciencedirect.com/science/article/pii/S0038092X12002964

[25] Peng S, Yao T T, Yang Y et al. Influences of the RF power ratio on the optical and electrical properties of GZO thin films by DC coupled RF magnetron sputtering at room temperature[J]. Physica B: Condensed Matter, 503, 111-116(2016). http://www.sciencedirect.com/science/article/pii/S0921452616304380

[26] Yan X, Li W M, Aberle A G et al. Investigation of the thickness effect on material and surface texturing properties of sputtered ZnO∶Al films for thin-film Si solar cell applications[J]. Vacuum, 123, 151-159(2015). http://adsabs.harvard.edu/abs/2016Vacuu.123..151Y

[27] Ajimsha R S, Das A K, Misra P et al. Observation of low resistivity and high mobility in Ga doped ZnO thin films grown by buffer assisted pulsed laser deposition[J]. Journal of Alloys and Compounds, 638, 55-58(2015). http://www.sciencedirect.com/science/article/pii/s0925838815006027

[28] Shin H H, Joung Y H, Kang S J. Influence of the substrate temperature on the optical and electrical properties of Ga-doped ZnO thin films fabricated by pulsed laser deposition[J]. Journal of Materials Science: Materials in Electronics, 20, 704-708(2009). http://link.springer.com/article/10.1007/s10854-008-9788-9

[29] Tsay C Y, Hsu W T. Comparative studies on ultraviolet-light-derived photoresponse properties of ZnO, AZO, and GZO transparent semiconductor thin films[J]. Materials, 10, 1379(2017). http://europepmc.org/articles/PMC5744314/

[30] Mahdhi H, Ben Ayadi Z, Hadded N et al. Study of gallium doping and substrate temperature effects on structural, electrical and optical properties of ZnO semiconductor layers[J]. Journal of Materials Science: Materials in Electronics, 26, 9873-9881(2015). http://link.springer.com/article/10.1007/s10854-015-3663-2

[31] Guo D S, Chen Z N, Wang D K et al. Effects of annealing temperature on crystal quality and photoelectric properties of Al-doped ZnO thin film[J]. Chinese Journal of Lasers, 46, 0403002(2019).