Chinese Journal of Lasers, Volume. 46, Issue 10, 1003001(2019)

Preparation of Low-Resistivity GZO Thin Films Using Pulsed Laser Deposition and Investigation of Optoelectronic Properties

Guankong Mo, Jiahui Liu, Zhuoliang Zou, Zimei Tang, Yulun Liu, Huan He, Yuechun Fu, and Xiaoming Shen*
Author Affiliations
  • School of Resources, Environment and Materials, Guangxi University, Guangxi Key Laboratory of Processing for Non-Ferrous Metals and Featured Materials, Nanning, Guangxi 530004, China
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    Ga-doped ZnO (GZO) transparent conductive thin films are deposited on glass substrates via the pulsed laser deposition method; further, the influence of oxygen pressure on the structure, surface morphology, and photoelectric properties of the GZO thin film is systematically investigated using X-ray diffractometer, ultraviolet-visible spectroscopy, atomic force microscopy, and Hall test system. Results show that all the samples exhibit a hexagonal wurtzite structure with a preferred orientation along the c-axis. Homogeneous, dense, and compact surfaces are obtained for all the GZO films. The crystal size initially increases and then decreases with the increasing oxygen pressure; optimum crystallinity is observed at an oxygen pressure of 0.5 Pa. The prepared GZO films exhibit a transmittance higher than 91.97% in the visible region; the band gap of the GZO film is 3.492-3.576 eV. The carrier density and Hall mobility initially increase and then decrease with the increasing oxygen pressure. The resistivity initially decreases when the oxygen pressure increases. However, with a further increase in the oxygen pressure, the resistivity increases. The minimum resistivity of 2.95×10 -4 Ω·cm is observed when the oxygen pressure is 0.5 Pa.

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    Guankong Mo, Jiahui Liu, Zhuoliang Zou, Zimei Tang, Yulun Liu, Huan He, Yuechun Fu, Xiaoming Shen. Preparation of Low-Resistivity GZO Thin Films Using Pulsed Laser Deposition and Investigation of Optoelectronic Properties[J]. Chinese Journal of Lasers, 2019, 46(10): 1003001

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    Paper Information

    Category: materials and thin films

    Received: Apr. 15, 2019

    Accepted: Jun. 5, 2019

    Published Online: Oct. 25, 2019

    The Author Email: Shen Xiaoming (docsjh@ gxu.edu.cn)

    DOI:10.3788/CJL201946.1003001

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