Chinese Journal of Lasers, Volume. 50, Issue 14, 1404006(2023)

Mueller Matrix Model in Ellipsometry Measurement of Quartz Crystal

Yu Zhao1,2, Linghao Zhang1,2, Aijun Zeng1,2、*, Huijie Huang2, and Avakaw Sergey3
Author Affiliations
  • 1Laboratory of Information Optics and Optoelectronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2Center of Materials Science and Optoelectronics Enginering, University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Company of KBTEM-OMO Republication Unitary Scientific and Production Enterprise, Minsk 220033, Belarus
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    Yu Zhao, Linghao Zhang, Aijun Zeng, Huijie Huang, Avakaw Sergey. Mueller Matrix Model in Ellipsometry Measurement of Quartz Crystal[J]. Chinese Journal of Lasers, 2023, 50(14): 1404006

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    Paper Information

    Category: Measurement and metrology

    Received: Dec. 30, 2022

    Accepted: Feb. 27, 2023

    Published Online: Jul. 10, 2023

    The Author Email: Zeng Aijun (aijunzeng@siom.ac.cn)

    DOI:10.3788/CJL221577

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