Chinese Journal of Lasers, Volume. 50, Issue 14, 1404006(2023)

Mueller Matrix Model in Ellipsometry Measurement of Quartz Crystal

Yu Zhao1,2, Linghao Zhang1,2, Aijun Zeng1,2、*, Huijie Huang2, and Avakaw Sergey3
Author Affiliations
  • 1Laboratory of Information Optics and Optoelectronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2Center of Materials Science and Optoelectronics Enginering, University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Company of KBTEM-OMO Republication Unitary Scientific and Production Enterprise, Minsk 220033, Belarus
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    Figures & Tables(7)
    Crystal coordinate system, measurement coordinate system and Euler angles
    Schematic diagram of measuring system
    Phase retardation dispersion curves fitted with built-in model for different azimuthal angles
    Measurement and fitting results of thick sample. (a) Dispersion curves of actually measured Mueller matrix elements; (b) dispersion curves of Mueller matrix elements fitted by Mueller matrix model; (c) difference curves between actually measured values and model fitted values
    RMSE values of two samples at different azimuthal angles and incident angles
    • Table 1. Thicknesses of two samples

      View table

      Table 1. Thicknesses of two samples

      SampleReference valueFitting value
      Thick quartz0.8340.832
      Thin quartz0.6950.691
    • Table 2. Fitting parameter results of two samples

      View table

      Table 2. Fitting parameter results of two samples

      SamplePhase retardation at 193 nm /(°)Euler angle θE /(′)
      Thick quartz1.711.902
      Thin quartz0.771.932
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    Yu Zhao, Linghao Zhang, Aijun Zeng, Huijie Huang, Avakaw Sergey. Mueller Matrix Model in Ellipsometry Measurement of Quartz Crystal[J]. Chinese Journal of Lasers, 2023, 50(14): 1404006

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    Paper Information

    Category: Measurement and metrology

    Received: Dec. 30, 2022

    Accepted: Feb. 27, 2023

    Published Online: Jul. 10, 2023

    The Author Email: Zeng Aijun (aijunzeng@siom.ac.cn)

    DOI:10.3788/CJL221577

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