Chinese Journal of Lasers, Volume. 50, Issue 14, 1404006(2023)
Mueller Matrix Model in Ellipsometry Measurement of Quartz Crystal
Fig. 1. Crystal coordinate system, measurement coordinate system and Euler angles
Fig. 3. Phase retardation dispersion curves fitted with built-in model for different azimuthal angles
Fig. 4. Measurement and fitting results of thick sample. (a) Dispersion curves of actually measured Mueller matrix elements; (b) dispersion curves of Mueller matrix elements fitted by Mueller matrix model; (c) difference curves between actually measured values and model fitted values
Fig. 5. RMSE values of two samples at different azimuthal angles and incident angles
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Yu Zhao, Linghao Zhang, Aijun Zeng, Huijie Huang, Avakaw Sergey. Mueller Matrix Model in Ellipsometry Measurement of Quartz Crystal[J]. Chinese Journal of Lasers, 2023, 50(14): 1404006
Category: Measurement and metrology
Received: Dec. 30, 2022
Accepted: Feb. 27, 2023
Published Online: Jul. 10, 2023
The Author Email: Zeng Aijun (aijunzeng@siom.ac.cn)