Mueller Matrix Model in Ellipsometry Measurement of Quartz Crystal

Yu Zhao; Linghao Zhang; Aijun Zeng; Huijie Huang; Avakaw Sergey

doi:10.3788/CJL221577

Chinese Journal of Lasers, Volume. 50, Issue 14, 1404006(2023)

Mueller Matrix Model in Ellipsometry Measurement of Quartz Crystal

Yu Zhao^1,2, Linghao Zhang^1,2, Aijun Zeng^1,2、*, Huijie Huang², and Avakaw Sergey³

¹Laboratory of Information Optics and Optoelectronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²Center of Materials Science and Optoelectronics Enginering, University of Chinese Academy of Sciences, Beijing 100049, China

³Company of KBTEM-OMO Republication Unitary Scientific and Production Enterprise, Minsk 220033, Belarus

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Yu Zhao, Linghao Zhang, Aijun Zeng, Huijie Huang, Avakaw Sergey. Mueller Matrix Model in Ellipsometry Measurement of Quartz Crystal[J]. Chinese Journal of Lasers, 2023, 50(14): 1404006

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Paper Information

Category: Measurement and metrology

Received: Dec. 30, 2022

Accepted: Feb. 27, 2023

Published Online: Jul. 10, 2023

The Author Email: Zeng Aijun (aijunzeng@siom.ac.cn)

DOI:10.3788/CJL221577

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology