Fig. 1. Schematic diagram of angle-resolved scatterometer

Fig. 2. Flowchart of diffraction signal distribution calculation

Fig. 3. Schematic diagram of positions of incident light and diffraction signal

Fig. 4. Schematic diagram of positions of incident and diffraction light in xoz plane

Fig. 5. Schematic diagram of annular aperture and corresponding optical signal. (a) Shape; (b) convergent light spot; (c) diffraction signal

Fig. 6. Schematic diagram of BMW aperture and corresponding optical signal. (a) Shape; (b) convergent light spot; (c) diffraction signal

Fig. 7. Schematic diagram of arch aperture and corresponding optical signal. (a) Shape; (b) convergent light spot; (c) diffraction signal

Fig. 8. Schematic diagram of overlay label 1. (a) Main view of LOL structure; (b) top view of LOL structure; (c) main view of LOT structure; (d) top view of LOT structure

Fig. 9. Comparison of diffraction efficiency curves with incident light wavelength under different conditions for overlay label 1. (a) LOL structure with TM polarization; (b) LOL structure with TE polarization; (c) LOT structure with TM polarization; (d) LOT structure with TE polarization

Fig. 10. Curves of η_DE of overlay label 1 as a function of wavelength of incident light under different conditions. (a) LOL structure with TM polarization; (b) LOL structure with TE polarization; (c) LOT structure with TM polarization; (d) LOT structure with TE polarization

Fig. 11. Curves of K of overlay label 1 as a function of wavelength of incident light under different conditions. (a) LOL structure with TM polarization; (b) LOL structure with TE polarization; (c) LOT structure with TM polarization; (d) LOT structure with TE polarization

Fig. 12. Curves of ξ_SS of overlay label 1 as a function of wavelength of incident light under different conditions. (a) LOL structure with TM polarization; (b) LOL structure with TE polarization; (c) LOT structure with TM polarization; (d) LOT structure with TE polarization.

Fig. 13. Schematic diagram of overlay label 2. (a) Main view of LOL structure; (b) top view of LOL structure; (c) main view of LOT structure; (d) top view of LOT structure

Fig. 14. Curves of η_DE of overlay label 2 as a function of wavelength of incident light under different conditions. (a) LOL structure with TM polarization; (b) LOL structure with TE polarization; (c) LOT structure with TM polarization; (d) LOT structure with TE polarization

Fig. 15. Curves of K of overlay label 2 as a function of wavelength of incident light under different conditions. (a) LOL structure with TM polarization; (b) LOL structure with TE polarization; (c) LOT structure with TM polarization; (d) LOT structure with TE polarization

Fig. 16. Curves of ξ_SS of overlay label 2 as a function of wavelength of incident light under different conditions. (a) LOL structure with TM polarization; (b) LOL structure with TE polarization; (c) LOT structure with TM polarization; (d) LOT structure with TE polarization