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Acta Optica Sinica, Volume. 45, Issue 9, 0905001(2025)

Characteristics of Aperture in Angle‑Resolved Scatterometer

Jun Qiu1,2, Yuejing Qi1,2、*, Jing Ma1, Zhiyu Shi1,2, Miao Jiang3, and Jiangliu Shi3
Author Affiliations
  • 1Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Beijing Superstring Academy of Memory Technology, Beijing 100176, China
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    Article index updated: Sep. 29, 2025

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    Jun Qiu, Yuejing Qi, Jing Ma, Zhiyu Shi, Miao Jiang, Jiangliu Shi. Characteristics of Aperture in Angle‑Resolved Scatterometer[J]. Acta Optica Sinica, 2025, 45(9): 0905001

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    Paper Information

    Category: Diffraction and Gratings

    Received: Jan. 15, 2025

    Accepted: Mar. 13, 2025

    Published Online: May. 20, 2025

    The Author Email: Yuejing Qi (qiyuejing@ime.ac.cn)

    DOI:10.3788/AOS250503

    CSTR:32393.14.AOS250503

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology