Chinese Journal of Lasers, Volume. 49, Issue 10, 1002502(2022)

Application of Ultrashort Pulse Laser Manufacturing in Microelectrical/Optical Interconnection

Xiaoyan Sun1,2, Chang Liang1,2, Wei Zhang1,2, Dejian Kong1,2, Yuting Feng1,2, Youwang Hu1,2、*, and Ji’an Duan1,2
Author Affiliations
  • 1College of Mechanical and Electrical Engineering, Central South University, Changsha 410083, Hunan, China
  • 2State Key Laboratory of High Performance Complex Manufacturing, Changsha 410083, Hunan, China
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    Figures & Tables(19)
    Multiphoton reduction to achieve electrical connection. (a) Electron microscopy of silver nanowires and electrodes; (b) high magnification electron microscopy of silver nanowires
    Electrical connection by femtosecond laser with assistant of surfactant[22]. (a) Schematic of gold nanowire reduction; (b) mechanism of multiphoton reduction of gold nanoparticles; (c) absorption spectra of HAuCl4, C5, and their mixture; (d) SEM image of gold nanowires; (e) AFM diagram of gold nanowires; (f) image of microcircuits
    Electrical connection is achieved within polymer matrix. (a) Gold electrode interconnection within PVP[27]; (b) reduction of gold nanowires in SU8 doped with Au3+[28]; (c) reduction of gold nanoparticles in composite photoresist[29]; (d) 3D electrical connection in composite photoresist[29]
    Electrical connection is realized by photodynamic assembly method[31]. (a) Schematic of photodynamic assembly method; (b) fabrication of cross-finger electrodes, double electrodes, and multiple electrodes by photodynamic assembly method
    Electrical connection is realized by femtosecond laser sintering of nanoparticles. (a) Femtosecond laser sintering of silver nanoparticles[39]; (b) femtosecond laser sintering of copper nanoparticles[43]
    Two-photon induced luminescence spectra of gold nanowire and its corresponding SEM images[53].(a) Single gold nanowire; (b) coupled gold nanowire
    Melted nanowire and electric field intensity distributions when laser polarization is perpendicular to the long axis of silver nanowire[54]. (a) Melting of nanowire ends, where the double sides arrow indicates the laser polarization direction; (b) the nanowire is dispersed and melted, and the nanowire is separated into nanoparticles; (c) absorption spectrum calculated by FDTD simulation; (d) electric field distribution calculated by FDTD; (e) electric field intensity distribution after silver nanowire melting on both ends; (f) electric field intensity distribution after nanoparticles separate from the ends of the nanowire
    Morphologies of silver nanowire and substrate after welding. (a) Silver nanowires connected at angle of 27°[12]; (b) silver nanowires connected at angle of 87°[12]; (c) morphology of silver nanowires welded by femtosecond laser[50]; (d) morphology of silver nanowires welded by nanosecond laser[50]; (e)(f) surface morphology and AFM diagram of PET after removing welded nanowires by ultrasonic cleaning[57]
    Morphologies of ZnO nanowires welded joint (laser energy is 77.6 mJ/cm2 and the irradiation time is 30 s)[59]. (a) X-shaped welded joint; (b) Y-shaped welded joint
    Morphology and field intensity distribution of Ag-TiO2 nanowires[60]. (a) Ag-TiO2 nanowires formed solder joint at the laser energy of 17.5 mJ/cm2; (b) electric field intensity distribution around crossed nanowires
    Interfacial field intensity distribution and welding morphology of Au-TiO2 under femtosecond laser irradiation. (a) Electric field intensity distribution around Au-TiO2 nanowires electrode connection structure under 800 nm wavelength laser irradiation, where the double sides arrow indicates the laser polarization direction[6]; (b) microstructure of Au-TiO2 connection structure after femtosecond laser irradiation for 5 s with energy density of 18.3 mJ/cm2[6]; (c)(d) microstructure of copper nanowire connected with silver substrate[64]
    Sketch of femtosecond laser direct writing graphene and reduced graphene oxide circuit[71]. (a) Experimental process for fabrication of fully reduced graphene oxide FET based on femtosecond laser direct writing technique, where step ⅰ represents reduction of graphene oxide by high energy femtosecond laser direct writing, step ⅱ represents preparation of reduced graphene oxide channel by adjusting laser energy, step ⅲ represents preparation of dielectric layer by spin-coating PMMA, step ⅳ represents spin-coating graphene oxide, and step ⅴ represent preparation of electrode by reduction of graphene oxide with laser direct writing; (b) laser direct written reduced graphene oxide circuit after preparation, repair, and adjustment
    Type Ⅰ waveguide fabricated by ultrafast laser. (a) Photograph and structure of L-shaped waveguide arrays[76]; (b) two-dimensional waveguide interconnection diagram[77]; (c) three-dimensional waveguide interconnection diagram[78]; (d) three-dimensional photonic wire bonding structure[82]; (e) two SOI waveguide interconnection on the same chip[82]; (f) interconnection of different chips[82]
    Morphologies and mode field diagrams of the end face of type Ⅱ waveguide. (a) End face morphologies in KTN crystal[88]; (b) end face mode field diagrams in z-cut MgO∶LiNbO3 crystal[87]; (c) end face morphologies in Bi4Ge3O12 crystal[89]; (d) end face mode field diagrams in Bi4Ge3O12 crystal[89]
    Morphology and mode field distributions of end face of type Ⅲ waveguide in ZBLAN crystal[92]
    Different couplers and their end-face mode field distribution. (a) Three-dimensional coupler[9]; (b) 1×2 coupler[97]; (c) 2×2 coupler[97]; (d) 3×3 coupler[97]
    Beam splitters fabricated by ultrafast lasers. (a) Structure and light splitting of 1-2, 1-4, and 1-8 beam splitters[99]; (b) Y beam splitter based on type Ⅲ waveguide[104]; (c) 1-4, 1-9, and 1-16 waveguide beam splitters prepared by 3D printing method[105]
    Other optical discrete components. (a) Microlens array prepared by femtosecond laser combined with chemical etching[108]; (b) Fresnel zone plate prepared by two-photon polymerization technology[110]; (c) multi-core fiber to single-mode fiber interface device[115]
    • Table 1. Processing methods and advantages involved in the application of ultrashort pulse laser in the field of microelectrical/optical interconnection

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      Table 1. Processing methods and advantages involved in the application of ultrashort pulse laser in the field of microelectrical/optical interconnection

      Processing fieldProcessing methodMechanismMaterialAdvantageApplication fieldReference
      Electrical interconnectionMultiphoton reductionMultiphoton absorption effectPrecursor solutionOne-step processing, processing complex 3D structuresFabrication of 2D or 3D electrical interconnect structures[11, 15-30]
      Photodynamic assemblyOptical driveNanoparticle suspensionMigrating metal particles rapidly,good structural consistencyDirect writing electrode, preparation of field effect transistor, etc.[31-44]
      Sintering methodSurface plasmon resonanceNanoparticle inkDirect sintering, no ion diffusion
      Welding methodSurface plasmon resonanceNanowire, graphene, etcSelf-limiting welding, no thermal damage to the substrateFlexible display,flexible sensor,memristor, electrode repair, etc.[53-71]
      Optical interconnectionModification methodRefractive index changeTransparent medium such as glassMachining directly on or inside the materialThree dimensional optical waveguide, coupler, beam splitter, etc.[74-80, 85-93]
      Two-photon polymerizationTwo-photon absorption effectPolymer solutionFlexible preparation,processing complex 3D structures[8084110116]
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    Xiaoyan Sun, Chang Liang, Wei Zhang, Dejian Kong, Yuting Feng, Youwang Hu, Ji’an Duan. Application of Ultrashort Pulse Laser Manufacturing in Microelectrical/Optical Interconnection[J]. Chinese Journal of Lasers, 2022, 49(10): 1002502

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    Paper Information

    Received: Dec. 1, 2021

    Accepted: Jan. 19, 2022

    Published Online: May. 9, 2022

    The Author Email: Hu Youwang (huyw@csu.edu.cn)

    DOI:10.3788/CJL202249.1002502

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