Application of Ultrashort Pulse Laser Manufacturing in Microelectrical/Optical Interconnection

Xiaoyan Sun; Chang Liang; Wei Zhang; Dejian Kong; Yuting Feng; Youwang Hu; Ji’an Duan

doi:10.3788/CJL202249.1002502

Chinese Journal of Lasers, Volume. 49, Issue 10, 1002502(2022)

Application of Ultrashort Pulse Laser Manufacturing in Microelectrical/Optical Interconnection

Xiaoyan Sun^1,2, Chang Liang^1,2, Wei Zhang^1,2, Dejian Kong^1,2, Yuting Feng^1,2, Youwang Hu^1,2、*, and Ji’an Duan^1,2

Author Affiliations

¹College of Mechanical and Electrical Engineering, Central South University, Changsha 410083, Hunan, China

²State Key Laboratory of High Performance Complex Manufacturing, Changsha 410083, Hunan, China

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Xiaoyan Sun, Chang Liang, Wei Zhang, Dejian Kong, Yuting Feng, Youwang Hu, Ji’an Duan. Application of Ultrashort Pulse Laser Manufacturing in Microelectrical/Optical Interconnection[J]. Chinese Journal of Lasers, 2022, 49(10): 1002502

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Paper Information

Received: Dec. 1, 2021

Accepted: Jan. 19, 2022

Published Online: May. 9, 2022

The Author Email: Hu Youwang (huyw@csu.edu.cn)

DOI:10.3788/CJL202249.1002502

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology