[1] E. Ebelmen. Researches sur les combinaisons des acides borique et silicique avecles ethers. Ann. Chim. Phys., 16, 129(1846).

[2] J. H. Campbell, R. Hawley-Fedder, C. J. Stolz, J. A. Menapace, M. R. Borden, P. Whitman, J. Yu, M. Runkel, M. Riley, M. Feit, R. Hackel. NIF optical materials and fabrication technologies: an overview. Proc. SPIE, 5341, 84(2004).

[3] P. Belleville, P. Prene, C. Bonnin, L. Beaurain, Y. Montouillout. How smooth chemistry allows high power laser optical coating preparation. Proc. SPIE, 5250, 196(2004).

[4] R. J. Liu, R. Y. Zhan, Y. X. Tang, J. Q. Zhu. A moisture-resistant antireflective coating by sol-gel process for neodymium-doped phosphate laser glass. Chin. Opt. Lett., 4, 119(2006).

[5] Y. Wei, H. B. Lü, X. D. Jiang, C. Tang, H. Ren, K. Li. Fabrication of broadband antireflective films by sol-gel spin-coating process for high power lasers. High Power Laser Particle Beams, 15, 647(2003).

[6] J. Q. Zhu. Review of special issue on high power facility and technical development at the NLHPLP. High Power Laser Sci. Eng., 7, e12(2019).

[7] F. Suzuki-Vidal, T. Clayson, C. Stehle, U. Chaulagain, J. W. D. Halliday, M. Y. Sun, L. Ren, N. Kang, H. Y. Liu, B. Q. Zhu, J. Q. Zhu, C. D. Rossi, T. Mihailescu, P. Velarde, M. Cotelo, J. M. Foster, C. N. Danson, C. Spindloe, J. P. Chittenden, C. Kuranz. First radiative shock experiments on the SG-II laser. High Power Laser Sci. Eng., 9, e27(2021).

[8] H. Xiong, Y. X. Tang, L. L. Hu, H. Y. Li. An ORMOSIL porous double-layer broadband antireflective coating. Chin. Opt. Lett., 17, 112201(2019).

[9] M. G. Blanchin, B. Canut, Y. Lambert, V. S. Teodorescu, A. Barau, M. Zaharescu. Structure and dielectric properties of HfO2 films prepared by a sol–gel route. J. Sol-Gel Sci. Technol., 47, 165(2008).

[10] P. Belleville, P. Prené, B. Lambert. UV-cured sot-gel broadband antireflective and scratch-resistant coating for CRT. Proc. SPIE, 3943, 67(2000).

[11] Y. J. Guo, X. T. Zu, X. D. Jiang, X. D. Yuan, W. G. Zheng, S. Z. Xu, B. Y. Wang. Laser-induced damage mechanism of the sol–gel single-layer SiO2 acid and base thin films. Nucl. Instrum. Methods Phys. Res. B, 266, 3190(2008).

[12] M. L. Spaeth, K. R. Manes, D. H. Kalantar, P. E. Miller, J. E. Heebner, E. S. Bliss, D. R. Speck, T. G. Parham, P. K. Whitman, P. J. Wegner, P. A. Baisden, J. A. Menapace, M. W. Bowers, S. J. Cohen, T. I. Suratwala, J. M. Di Nicola, M. A. Newton, J. J. Adams, J. B. Trenholme, R. G. Finucane, R. E. Bonanno, D. C. Rardin, P. A. Arnold, S. N. Dixit, G. V. Erbert, A. C. Erlandson, J. E. Fair, E. Feigenbaum, W. H. Gourdin, R. A. Hawley, J. Honig, R. K. House, K. S. Jancaitis, K. N. LaFortune, D. W. Larson, B. J. Le Galloudec, J. D. Lindl, B. J. MacGowan, C. D. Marshall, K. P. McCandless, R. W. McCracken, R. C. Montesanti, E. I. Moses, M. C. Nostrand, J. A. Pryatel, V. S. Roberts, S. B. Rodriguez, A. W. Rowe, R. A. Sacks, J. T. Salmon, M. J. Shaw, S. Sommer, C. J. Stolz, G. L. Tietbohl, C. C. Widmayer, R. Zacharias. Description of the NIF laser. Fusion Sci. Technol., 69, 25(2016).

[13] S. D. Wang, Y. Y. Shu. Superhydrophobic antireflective coating with high transmittance. J. Coat. Technol. Res., 10, 527(2013).

[14] Q. H. Zhang, W. Yang, H. J. Ma, P. Ma, Q. Xu. Modification of porous silica antireflective coatings with fluorine-containing organosilicon. Acta Opt. Sin., 29, 1719(2009).

[15] M. Y. Wei, X. M. Wang, S. G. Qing, Z. K. Luo, H. X. Zheng, S. Q. Liu. Preparation of KH560/KH570 modified SiO2 antireflective coating. Mater. Rep. B, 26, 7(2012).

[16] M. V. Monticelli, M. C. Nostrand, N. Mehta, L. Kegelmeyer, M. A. Johnson, J. Fair, C. Widmayer. The HMDS coating flaw removal tool. Proc. SPIE, 7132, 71320V(2008).

[17] D. S. Hobbs, B. D. Macleod, E. Sabatino, J. A. Britten, C. J. Stolz. Contamination resistant antireflection nano-textures in fused silica for laser optics. Proc. SPIE, 8885, 88850J(2013).

[18] P. F. Belleville, H. G. Floch. Ammonia hardening of porous silica antireflective coatings. Proc. SPIE, 2288, 25(1994).

[19] H. Y. Li, Y. X. Tang. Study on stability of porous silica antireflective coatings prepared by sol-gel processing. Chin. J. Lasers, 32, 839(2005).

[20] C. L. Zhang, X. B. Li, H. B. Lü, X. D. Yuan, Z. G. Wang, X. T. Zu. Influence of impurities on laser-induced damage of sol-gel SiO2 films. High Power Laser Particle Beams, 23, 1267(2011).

[21] I. M. Thomas, A. K. Burnham, J. R. Ertel, S. C. Frieders. Method for reducing the effect of environmental contamination of sol gel optical coatings. Proc. SPIE, 3492, 220(1999).

[22] X. Y. Pang, M. Y. Sun, Q. T. Fan, H. Xiong, C. Y. Wang, Z. G. Liu. Online detection of airborne molecular contamination and its influence on the sol-gel coating. Proc. SPIE, 10748, 107480Z(2018).

[23] C. Shan, Y. A. Zhao, Y. Q. Gao, X. H. Zhao, G. H. Hu, W. X. Ma, J. D. Shao. Laser-induced defects in optical multilayer coatings by the spatial resolved method. Chin. Opt. Lett., 17, 031403(2019).

[24] T. Y. Pu, W. W. Liu, Y. L. Wang, X. M. Pan, L. Q. Chen, X. F. Liu. A novel laser shock post-processing technique on the laser-induced damage resistance of 1ω HfO2/SiO2 multilayer coatings. High Power Laser Sci. Eng., 9, e19(2021).