Three-step lithography to the fabrication of vertically coupled micro-ring resonators in amorphous silicon-on-insulator

Jun Cheng; Nan Yan

doi:10.3788/COL201513.082201

Chinese Optics Letters, Volume. 13, Issue 8, 082201(2015)

Three-step lithography to the fabrication of vertically coupled micro-ring resonators in amorphous silicon-on-insulator

Jun Cheng^* and Nan Yan

Author Affiliations

School of Electromechanical Engineering, Beijing Institute of Technology, Beijing 100081, China

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Jun Cheng, Nan Yan, "Three-step lithography to the fabrication of vertically coupled micro-ring resonators in amorphous silicon-on-insulator," Chin. Opt. Lett. 13, 082201 (2015)

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Paper Information

Category: Optical Design and Fabrication

Received: Mar. 21, 2015

Accepted: Jun. 8, 2015

Published Online: Sep. 14, 2018

The Author Email: Jun Cheng (2120100260@bit.edu.cn)

DOI:10.3788/COL201513.082201

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology