Chinese Optics Letters, Volume. 13, Issue 8, 082201(2015)
Three-step lithography to the fabrication of vertically coupled micro-ring resonators in amorphous silicon-on-insulator
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Jun Cheng, Nan Yan, "Three-step lithography to the fabrication of vertically coupled micro-ring resonators in amorphous silicon-on-insulator," Chin. Opt. Lett. 13, 082201 (2015)
Paper Information
Category: Optical Design and Fabrication
Received: Mar. 21, 2015
Accepted: Jun. 8, 2015
Published Online: Sep. 14, 2018
The Author Email: Jun Cheng (2120100260@bit.edu.cn)
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