Removal Uniformity in Ring-Pendulum Double-Sided Polishing Based on Pressure Distribution

Chen Mao; Bo Xiao; Chunyang Wang; Yifan Bai; Siling Huang; Dasen Wang

doi:10.3788/AOS240703

Acta Optica Sinica, Volume. 44, Issue 16, 1622001(2024)

Removal Uniformity in Ring-Pendulum Double-Sided Polishing Based on Pressure Distribution

Chen Mao¹, Bo Xiao^2、**, Chunyang Wang^3、*, Yifan Bai², Siling Huang⁴, and Dasen Wang⁴

Author Affiliations

¹College of Weapon Science and Technology, Xi’an Technological University, Xi’an 710000, Shaanxi, China

²School of Opto-Electronical Engineering, Xi’an Technological University, Xi’an 710000, Shaanxi, China

³Xi’an Key Laboratory of Active Photoelectric Imaging Detection Technology, Xi’an Technological University, Xi’an 710000, Shaanxi, China

⁴Ningbo Branch of Chinese Academy of Ordnance Science, Ningbo 315103, Zhejiang, China

show less

Abstract Get PDF(in Chinese)

References(17)

[1] Jin S P, Fu Y G, Jin Y H et al. High-precision transmission-wavefront-processing technology of large aperture Ti∶sapphire crystal at full spatial frequency[J]. Chinese Journal of Lasers, 46, 0903002(2019).

[2] Wang Z Z, Shi C C, Zhang P F et al. Recent progress of advanced optical manufacturing technology[J]. Journal of Mechanical Engineering, 57, 23-56(2021).

[3] Lin Z W, Wang Z Z, Huang X P et al. Influence of robotic structural deformation on bonnet polishing removal function[J]. High Power Laser and Particle Beams, 33, 24-32(2021).

[4] Jing H, Wang H X, Chen X H et al. Magnetorheological processing for large aperture plane optical elements[J]. Optics and Precision Engineering, 24, 3054-3060(2016).

[5] Chen B W, Sun S F, Wang X et al. Research progress of laser polishing technology for material surface[J]. China Surface Engineering, 34, 74-89(2021).

[6] Li Q, Liu Q L, Du Y J et al. Advances in optimization design and application of textured surfaces[J]. China Surface Engineering, 34, 59-73(2021).

[7] Cao M C, Zhao H Y, Xie R Q et al. Multiparameter optimization design of chemical mechanical polishing for planar optics[J]. The International Journal of Advanced Manufacturing Technology, 113, 2153-2162(2021).

[8] Wang L, Jiang K, Fan S Y et al. Morphology evolution mechanism of low-roughness surface polished by continuous laser[J]. Chinese Journal of Lasers, 50, 1202207(2023).

[9] Liao D F, Zhang F H, Xie R Q et al. Deterministic control of material removal distribution to converge surface figure in full-aperture polishing[J]. Journal of Manufacturing Processes, 53, 144-152(2020).

[10] He M Z, Zhou P F, Huang Y. Research on non-fixed ring belt double-side polishing technology[J]. High Power Laser and Particle Beams, 30, 38-42(2018).

[11] He M Z, Wang L, Zhou P F et al. Double-side polishing of 3 mm large-aperture ultra-thin component[J]. High Power Laser and Particle Beams, 25, 3315-3317(2013).

[12] Liao D F, Zhang F H, Xie R Q et al. Effect of interfacial friction force on material removal in full aperture continuous polishing process[J]. Precision Engineering, 63, 214-219(2020).

[13] Pal R K, Kumar M, Karar V. Experimental investigation of polishing process for Schott BK-7 optical glass[J]. Materials Today: Proceedings, 57, 734-738(2022).

[14] Zhang M Z, Zhao S J, Tian L et al. Investigation on surface figure control technology of medium-aperture optical component based on double-sided polishing[J]. Proceedings of SPIE, 12071, 120710D(2021).

[15] Xie R Q, Zhao S J, Liao D F et al. Numerical simulation and experimental study of surface waviness during full aperture rapid planar polishing[J]. The International Journal of Advanced Manufacturing Technology, 97, 3273-3282(2018).

[16] Ren L L, Zhang F H, Liao D F et al. Theoretical model and experimental analysis of non-uniform material removal during full-aperture polishing[J]. The International Journal of Advanced Manufacturing Technology, 101, 137-146(2019).

[17] Zhang C P, Yang L X, Xu H et al. Development and application of chemical mechanical polishing surface-pressure distribution detection device based on thin-film sensors[J]. Laser & Optoelectronics Progress, 60, 1512002(2023).

Tools

Get Citation

Copy Citation Text

Chen Mao, Bo Xiao, Chunyang Wang, Yifan Bai, Siling Huang, Dasen Wang. Removal Uniformity in Ring-Pendulum Double-Sided Polishing Based on Pressure Distribution[J]. Acta Optica Sinica, 2024, 44(16): 1622001

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category: Optical Design and Fabrication

Received: Mar. 6, 2024

Accepted: Apr. 18, 2024

Published Online: Jul. 31, 2024

The Author Email: Bo Xiao (xiaobo@xatu.edu.cn), Chunyang Wang (wangchunyang191@163.com)

DOI:10.3788/AOS240703

CSTR:32393.14.AOS240703

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology