Fig. 1. Ring pendulum double-sided polishing machine equipment sketch

Fig. 2. Schematic diagram of grid division

Fig. 3. Schematic diagram of the movement of the upper throwing disk

Fig. 4. Simplified model of circular pendulum double-sided polishing machine

Fig. 5. Simulation environment configuration

Fig. 6. Simulation calculation results of 300 mm upper disk self-weight. (a) Heat map of pressure distribution; (b) schematic diagram of pressure distribution

Fig. 7. Schematic diagram of self-weight pressure distribution

Fig. 8. Fitting results of self-weight

Fig. 9. Simulation environment configuration

Fig. 10. Schematic diagram of cylinder down pressure distribution

Fig. 11. Fitting result of cylinder down pressure distribution

Fig. 12. Schematic diagram of the exposed edge

Fig. 13. Schematic diagram of the exposed edge of the top polishing disc

Fig. 14. Distribution of surface removal on the component when considering only the velocity

Fig. 15. Distribution of surface removal on components when considering pressure and velocity

Fig. 16. Simulated removal distribution thermograms. (a) Machining pressure of 100 N; (b) machining pressure of 200 N; (c) machining pressure of 300 N; (d) machining pressure of 400 N

Fig. 17. Distribution of material removal on the upper surface of the component

Fig. 18. Simulated removal distribution thermograms. (a) Upper disk radius is 150 mm; (b) upper disk radius is 180 mm; (c) upper disk radius is 200 mm; (d) upper disk radius is 240 mm

Fig. 19. Distribution of component surface material removal

Fig. 20. Optical plane element

Fig. 21. Element initial face type

Fig. 22. Heat maps of removal distribution. (a) Calculation results of the removal taking into account only the velocity; (b) calculation results of the removal taking into account the speed and pressure

Fig. 23. Heat map of actual removal distribution

Fig. 24. Simulation results and active processing results. (a) Simulation result of a 150 mm upcast disc; (b) processing result of 150 mm upcast disc; (c) simulation result of 180 mm upcast disc; (d) processing result of 180 mm upcast disc; (e) simulation result of 200 mm upcast disc; (f) processing result of 200 mm upcast disc

Fig. 25. Element surface before machining

Fig. 26. Component surface after machining