Chinese Optics Letters, Volume. 18, Issue 8, 083101(2020)
Effects of various substrate materials on structural and optical properties of amorphous silicon nitride thin films deposited by plasma-enhanced chemical vapor deposition
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Liangyi Hang, Weiguo Liu, Junqi Xu, "Effects of various substrate materials on structural and optical properties of amorphous silicon nitride thin films deposited by plasma-enhanced chemical vapor deposition," Chin. Opt. Lett. 18, 083101 (2020)
Paper Information
Category: Thin Films and Optics at Surfaces
Received: Apr. 2, 2020
Accepted: Jun. 10, 2020
Posted: Jun. 10, 2020
Published Online: Jul. 14, 2020
The Author Email: Liangyi Hang (lyhang999@163.com), Weiguo Liu (wgliu@163.com)
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