Fig. 1. Schematic diagram of response time calibration principle for IR detectors, (a)The curve of radiation intensity with time; (b)The curve of output signal with time.

Fig. 2. MEMS thermopile IR detector：(a) SEM image of chip; (b)Bare chip; (c)Packaged detector

Fig. 3. Schematic diagram of a response time measurement system using a chopper

Fig. 4. A response time measurement system for MEMS infrared detectors using a pulsed laser

Fig. 5. Structure diagram of a AOM

Fig. 6. Pulsed signal of laser in the measurement system with a time parameter of 800ns

Fig. 7. Response time of a MEMS thermopile IR detector measured using a chopper

Fig. 8. Response time of a MEMS thermopile IR detector measured using a laser