[1] Xu D, Wang Y, Xiong B et al. ， MEMS-based thermoelectric infrared sensors： A review[J]. Frontiers of Mechanical Engineering, 12, 557-566(2017).

[2] Shen T W, Lee Y C, Chang K C, enhancement Responsivity et al[C]. Responsivity enhancement of CMOS-MEMS thermoelectric infrared sensor by heat transduction absorber design, 29-32(2018).

[3] Suman S, Gaitan M, Joshi Y et al. ， Wire-bonding process monitoring using thermopile temperature sensor[J]. IEEE transactions on advanced packaging, 28, 685-693(2005).

[4] Kaiser A, Rethfeld B, Vicanek M et al. ， Microscopic processes in dielectrics under irradiation by subpicosecond laser pulses[J]. Physical Review B, 61, 11437(2000).

[5] Arregui F J, Cooper K L, Liu Y et al. ， Optical fiber humidity sensor with a fast response time using the ionic self-assembly method[J]. IEICE Transactions on Electronics, 83, 360-365(2000).

[6] Mao H, Chen Y, Ou Y et al. ， Fabrication of nanopillar forests with high infrared absorptance based on rough poly-Si and spacer technology[J]. Journal of Micromechanics and Microengineering, 23, 095033(2013).

[7] Li R, Mao H, Yang Y, soot Candle et al[C]. Candle soot with broadband high absorptance for applications of infrared sensors(882885).

[8] Tan Q, Tang L, Mao H et al. ， Nanoforest of black silicon fabricated by AIC and RIE method[J]. Materials Letters, 164, 613-617(2016).

[9] Lv P, Zhang X, Zhang X et al. ， High-sensitivity and fast-response graphene/crystalline silicon Schottky junction-based near-IR photodetectors[J]. IEEE Electron Device Letters, 34, 1337-1339(2013).

[10] Mao H Y, Lei C, Chen Y J, forests Nanofiber et al[C]. Nanofiber forests with high infrared absorptance, 644-647(2014).

[12] Sakata M, Hamada Y, Takeuchi K et al. ， Characteristics of a liquid crystal IR chopper for pyroelectric IR sensors[J]. Sensors & Actuators A, 40, 195-201(1994).

[15] Mesleh R. Acousto-optical modulators for free space optical wireless communication systems[J]. Journal of Optical Communications and Networking, 10, 515-522(2018).

[16] Giese E, Friedrich A, Abend S et al. ， Light shifts in atomic Bragg diffraction[J]. Physical Review A, 94, 063619(2016).

[17] Itano W M, Bollinger J J, Tan J N et al. ， Bragg diffraction from crystallized ion plasmas[J]. Science, 279, 686-689(1998).