Journal of Infrared and Millimeter Waves, Volume. 39, Issue 5, 619(2020)

A response time measurement method for MEMS IR detectors

Chen-Chen ZHANG1,2, Hai-Yang MAO2,3、*, Le-Le BAI4, Ji-Jun XIONG1, Wei-Bing WANG2, and Da-Peng CHEN2,3
Author Affiliations
  • 1North University of China, Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, Shanxi Provincial Key Laboratory of Dynamic Testing Technology, Taiyuan030051, China
  • 2Institute of Microelectronics of Chinese Academy of Sciences, Beijing100029, China
  • 3Advanced Sensing Department, Wuxi Internet of Things Innovation Center Co. Ltd., Wuxi214001, China
  • 4State key laboratory of Quantum Optics and Quantum Optics Devices, Shanxi University, Taiyuan030006, China
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    As is known, response time of a MEMS infrared (IR) detector is usually measured using a complicated measurement system consisting of a blackbody radiation source, a chopper and a water-cooling apparatus. For such a system, both blocking and hollow patterns in the chopper have certain areas, which consume a certain part of time when the chopper spins at a certain frequency. In conventional measurements of response time, however, it is difficult to exclude the time consumed by a chopper, as a result, a large error is usually introduced into the system. To address such an issue, a response time measurement system for MEMS IR detectors using a fast-pulse laser as its radiation source is proposed in this work. Such a system is able to avoid extra time parameter being introduced by equipment . For a thermopile IR detector, response time measured based on traditional method is 14.46ms, while based on the newly established system, the response time is only 3.13ms. This indicates that the new method can perfectly avoid a 300% time error introduced by the traditional method.

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    Chen-Chen ZHANG, Hai-Yang MAO, Le-Le BAI, Ji-Jun XIONG, Wei-Bing WANG, Da-Peng CHEN. A response time measurement method for MEMS IR detectors[J]. Journal of Infrared and Millimeter Waves, 2020, 39(5): 619

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    Paper Information

    Category: Photoelectric Technology and Application

    Received: Apr. 8, 2020

    Accepted: --

    Published Online: Dec. 29, 2020

    The Author Email: Hai-Yang MAO (maohaiyang@ime.ac.cn)

    DOI:10.11972/j.issn.1001-9014.2020.05.013

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