Journal of Semiconductors, Volume. 46, Issue 8, 082302(2025)
A semiconductor radiation dosimeter fabricated in 8-inch process
Fig. 2. (Color online) Schematic diagram of charge distribution in MOS gate oxide.
Fig. 6. (Color online) Pre-irradiation measurement data. (a) The transfer characteristics curve, (b) the output characteristics curve with different gate to source voltage (VGS).
Fig. 7. (Color online) Map data. (a) The drain to source breakdown voltage (BVDS), (b) the threshold voltage (Vtlin_cal), (c) the leakage current (ioff). The map data exhibit very uniform distribution.
Fig. 9. (Color online) The dependence of threshold voltage variation on irradiation dose.
Fig. 10. (Color online) The characteristics curves of the RADFETs before and after irradiation at 100 krad(Si). (a) The current RC_I change curve, (b) the transfer characteristics curve of RADFET.
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Jun Huang, Bojin Pan, Hang bao, Qiuyue Huo, Renxiong Li, Qi Ding, Yutuo Guo, Yu Wang, Kunqin He, Yaxin Liu, Ziyi Zeng, Ning Ning, Lulu Peng. A semiconductor radiation dosimeter fabricated in 8-inch process[J]. Journal of Semiconductors, 2025, 46(8): 082302
Category: Research Articles
Received: Dec. 19, 2024
Accepted: --
Published Online: Aug. 27, 2025
The Author Email: Lulu Peng (LLPeng)