Researching | A semiconductor radiation dosimeter fabricated in 8-inch process

Journal of Semiconductors, Volume. 46, Issue 8, 082302(2025)

A semiconductor radiation dosimeter fabricated in 8-inch process

Jun Huang, Bojin Pan, Hang bao, Qiuyue Huo, Renxiong Li, Qi Ding, Yutuo Guo, Yu Wang, Kunqin He, Yaxin Liu, Ziyi Zeng, Ning Ning, and Lulu Peng^*

Author Affiliations

United Microelectronics Center Co., Ltd, Chongqing 401332, China

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References(17)

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[2] A Karmakar, J L Wang, J Prinzie et al. A review of semiconductor based ionising radiation sensors used in harsh radiation environments and their applications. Radiation, 1, 194(2021).

[3] S M Pejović, M M Pejović, M Živanović. Small dose effect in RADFET with thick gate oxide. Appl Radiat Isot, 152, 72(2019).

[4] A Morozzi, F Moscatelli, T Croci et al. TCAD modeling of surface radiation damage effects: A state-of-the-art review. Front Phys, 9, 617322(2021).

[5] M M Pejović, S M Pejović. P-channel MOSFET as ionizing radiation detector. Appl Radiat Isot, 196, 110730(2023).

[6] M Andjelkovic, A Simevski, J C Chen et al. A design concept for radiation hardened RADFET readout system for space applications. Microprocess Microsyst, 90, 104486(2022).

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[8] S Ullah. A fully integrated rad FET dosimeter for radiation measurement in space, 225(2021).

[9] D Elfiky, A S Abd-Rabou, H Akah et al. Development and fabrication of MOSFET-based radiation dosimeter (RadFET) for enhanced performance in space missions. J Adv Res Appl Sci Eng Technol, 39, 135(2024).

[10] I Ruiz-García, P Martín-Holgado, P Escobedo et al. Temperature effects on the sensitivity of gamma MOSFET dosimeters, 1(2023).

[11] T Y Zhang, Y Hong, J Y Li et al. Radiation hardened MOSFETs realized by Al2O3 induced Bi-GdF3 with trapped interfacial electrons located in Ti3C2T framework. Compos Sci Technol, 258, 110911(2024).

[12] M Kulhar, K Dhoot, A Pandya. Gamma dose rate measurement using RadFET. IEEE Trans Nucl Sci, 66, 2220(2019).

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Jun Huang, Bojin Pan, Hang bao, Qiuyue Huo, Renxiong Li, Qi Ding, Yutuo Guo, Yu Wang, Kunqin He, Yaxin Liu, Ziyi Zeng, Ning Ning, Lulu Peng. A semiconductor radiation dosimeter fabricated in 8-inch process[J]. Journal of Semiconductors, 2025, 46(8): 082302

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Paper Information

Category: Research Articles

Received: Dec. 19, 2024

Accepted: --

Published Online: Aug. 27, 2025

The Author Email: Lulu Peng (LLPeng)

DOI:10.1088/1674-4926/24120027

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology