Fig. 1. Schematic of MgF₂-Al grating structure based on SiO₂ substrate

Fig. 2. Transmission and extinction ratio of MgF₂-Al polarization grating versus grating period P. (a) Transmission curves of the grating; (b) corresponding extinction ratio curves of the grating

Fig. 3. Transmission and extinction ratio of MgF₂-Al polarization grating versus grating width W.(a) Transmission curves of the grating; (b) corresponding extinction ratio curves of the grating

Fig. 4. Transmission of MgF₂-Al polarization grating as functions of the grating heights. (a) Transmission of the grating versus the height of Al grating layer H₂; (b) transmission of the graing versus the height of MgF₂ grating layer H₁

Fig. 5. Structures of single-layer Al grating and MgF₂-Al grating, and the relationship between transmittance or extinction ratio of three grating structures and incident wavelength. (a) Structural cross-sectional views of Al-grating polarizer; (b) structural cross-sectional views of MgF₂-Al grating polarizer; (c) transmittance of three gratings with different structures at different wavelengths; (d) extinction ratio of three gratings with different structures at different waveleng

Fig. 6. Transmission, reflection and absorption of MgF₂-Al grating under different polarized light as a function of incident wavelength. (a) TM polarized light; (b) TE polarized light

Fig. 7. Grating electric field diagram of different polarized light at normal incidence at incident wavelength of 0.193 μm. (a) TM polarized light; (b) TE polarized light